Global Patent Index - EP 0833705 A1

EP 0833705 A1 19980408 - ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROFLUORIC ACID FOR SEMICONDUCTOR PROCESSING

Title (en)

ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROFLUORIC ACID FOR SEMICONDUCTOR PROCESSING

Title (de)

HERSTELLUNG AN ORT UND STELLE VON ULTRAREINER FLUORWASSERSTOFFSÄURE FÜR DIE HALBLEITERHERSTELLUNG

Title (fr)

FABRICATION SUR SITE D'ACIDE FLUORHYDRIQUE ULTRA-PUR DESTINE AU TRAITEMENT DES SEMI-CONDUCTEURS

Publication

EP 0833705 A1 19980408 (EN)

Application

EP 96919223 A 19960605

Priority

  • US 9609554 W 19960605
  • US 9507649 W 19950605
  • US 49941495 A 19950707
  • US 3871195 P 19950707

IPC 1-7

B08B 7/04; B01D 1/00; B01D 3/14; B01D 3/02; B01D 3/00; C01B 7/19; C01B 7/07; F26B 7/00

IPC 8 full level

B01D 1/00 (2006.01); B01D 3/00 (2006.01); B01D 3/02 (2006.01); B01D 3/14 (2006.01); B08B 7/04 (2006.01); C01B 7/07 (2006.01); C01B 7/19 (2006.01); F26B 7/00 (2006.01)

Designated contracting state (EPC)

DE FR GB IT NL

DOCDB simple family (publication)

EP 0833705 A1 19980408; EP 0833705 A4 19991215

DOCDB simple family (application)

EP 96919223 A 19960605