Global Patent Index - EP 0835169 A1

EP 0835169 A1 19980415 - ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROCHLORIC ACID FOR SEMICONDUCTOR PROCESSING

Title (en)

ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROCHLORIC ACID FOR SEMICONDUCTOR PROCESSING

Title (de)

HERSTELLUNGAN ORT VON ULTRAHOCHREINER SALZSAURE FUER HALBLEITERBEHANDLUNG

Title (fr)

FABRICATION SUR SITE D'ACIDE CHLORHYDRIQUE ULTRAPUR POUR LE TRAITEMENT DES SEMI-CONDUCTEURS

Publication

EP 0835169 A1 19980415 (EN)

Application

EP 96919224 A 19960605

Priority

  • US 9609555 W 19960605
  • US 9507649 W 19950605
  • US 49941395 A 19950707
  • US 3871295 P 19950707

IPC 1-7

B08B 7/04; B01D 1/00; B01D 3/14; B01D 3/02; B01D 3/00; C01B 7/19; C01B 7/07; F26B 7/00

IPC 8 full level

B01D 1/00 (2006.01); B01D 3/00 (2006.01); B01D 3/02 (2006.01); B01D 3/14 (2006.01); B08B 7/04 (2006.01); C01B 7/07 (2006.01); C01B 7/19 (2006.01); F26B 7/00 (2006.01)

Designated contracting state (EPC)

DE FR GB IT NL

DOCDB simple family (publication)

EP 0835169 A1 19980415; EP 0835169 A4 19991215

DOCDB simple family (application)

EP 96919224 A 19960605