EP 0835169 A1 19980415 - ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROCHLORIC ACID FOR SEMICONDUCTOR PROCESSING
Title (en)
ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROCHLORIC ACID FOR SEMICONDUCTOR PROCESSING
Title (de)
HERSTELLUNGAN ORT VON ULTRAHOCHREINER SALZSAURE FUER HALBLEITERBEHANDLUNG
Title (fr)
FABRICATION SUR SITE D'ACIDE CHLORHYDRIQUE ULTRAPUR POUR LE TRAITEMENT DES SEMI-CONDUCTEURS
Publication
Application
Priority
- US 9609555 W 19960605
- US 9507649 W 19950605
- US 49941395 A 19950707
- US 3871295 P 19950707
IPC 1-7
B08B 7/04; B01D 1/00; B01D 3/14; B01D 3/02; B01D 3/00; C01B 7/19; C01B 7/07; F26B 7/00
IPC 8 full level
B01D 1/00 (2006.01); B01D 3/00 (2006.01); B01D 3/02 (2006.01); B01D 3/14 (2006.01); B08B 7/04 (2006.01); C01B 7/07 (2006.01); C01B 7/19 (2006.01); F26B 7/00 (2006.01)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
DOCDB simple family (application)
EP 96919224 A 19960605