Global Patent Index - EP 0836719 A1

EP 0836719 A1 19980422 - SYSTEM AND METHOD FOR ON-SITE MIXING OF ULTRA-HIGH-PURITY CHEMICALS FOR SEMICONDUCTOR PROCESSING

Title (en)

SYSTEM AND METHOD FOR ON-SITE MIXING OF ULTRA-HIGH-PURITY CHEMICALS FOR SEMICONDUCTOR PROCESSING

Title (de)

VERFAHREN UND SYSTEM ZUM ÖRTLICHEN MISCHEN VON EXTREM HOCHREINEN CHEMIKALIEN FÜR DIE HALBLEITERHERSTELLUNG

Title (fr)

SYSTEME ET PROCEDE DE MELANGE IN SITU DE PRODUITS CHIMIQUES A PURETE ULTRAELEVEE POUR L'ELABORATION DE SEMI-CONDUCTEURS

Publication

EP 0836719 A1 19980422 (EN)

Application

EP 96919439 A 19960605

Priority

  • US 9610389 W 19960605
  • US 9507649 W 19950605
  • US 49956295 A 19950707
  • US 61272996 A 19960308
  • US 1810495 P 19950707
  • US 1782896 P 19960308

IPC 1-7

G05D 11/13

IPC 8 full level

G05D 11/13 (2006.01)

Designated contracting state (EPC)

DE FR GB IT NL

DOCDB simple family (publication)

EP 0836719 A1 19980422; EP 0836719 A4 19990818

DOCDB simple family (application)

EP 96919439 A 19960605