EP 0836719 A1 19980422 - SYSTEM AND METHOD FOR ON-SITE MIXING OF ULTRA-HIGH-PURITY CHEMICALS FOR SEMICONDUCTOR PROCESSING
Title (en)
SYSTEM AND METHOD FOR ON-SITE MIXING OF ULTRA-HIGH-PURITY CHEMICALS FOR SEMICONDUCTOR PROCESSING
Title (de)
VERFAHREN UND SYSTEM ZUM ÖRTLICHEN MISCHEN VON EXTREM HOCHREINEN CHEMIKALIEN FÜR DIE HALBLEITERHERSTELLUNG
Title (fr)
SYSTEME ET PROCEDE DE MELANGE IN SITU DE PRODUITS CHIMIQUES A PURETE ULTRAELEVEE POUR L'ELABORATION DE SEMI-CONDUCTEURS
Publication
Application
Priority
- US 9610389 W 19960605
- US 9507649 W 19950605
- US 49956295 A 19950707
- US 61272996 A 19960308
- US 1810495 P 19950707
- US 1782896 P 19960308
IPC 1-7
IPC 8 full level
G05D 11/13 (2006.01)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
DOCDB simple family (application)
EP 96919439 A 19960605