EP 0844395 B1 20051019 - Bidirectional micropump
Title (en)
Bidirectional micropump
Title (de)
Bidirektionale dynamische Mikropumpe
Title (fr)
Micropompe réversible
Publication
Application
Priority
DE 19648694 A 19961125
Abstract (en)
[origin: EP0844395A2] The channels (7,8) have different cross-sectional shapes or surfaces or different lengths or a combination of these. They have non-linear, undirected flow resistances of varying characteristics and their variable fluid flows are controlled in direction-dependent manner between laminar and turbulent flow with suitable impulses applied to the actuator (3) with unsymmetrical flank steepness. The structure is formed by anisotropic etching in a silicon wafer (1), is closed with a cover and provided with a piezo-actuator (3). The impulse has a flank steepness during at least the lapse of a period, which during this period produces a turbulent flow in one of the channels.
IPC 1-7
IPC 8 full level
F04B 43/04 (2006.01); F04B 53/10 (2006.01)
CPC (source: EP US)
F04B 43/043 (2013.01 - EP US); F04B 53/1077 (2013.01 - EP); F04B 2203/0409 (2013.01 - EP)
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0844395 A2 19980527; EP 0844395 A3 20010110; EP 0844395 B1 20051019; AT E307292 T1 20051115; DE 19648694 C1 19980430; DE 59712449 D1 20060302
DOCDB simple family (application)
EP 97119955 A 19971114; AT 97119955 T 19971114; DE 19648694 A 19961125; DE 59712449 T 19971114