EP 0853815 A1 19980722 - FORMATION OF SOURCE/DRAIN FROM DOPED GLASS
Title (en)
FORMATION OF SOURCE/DRAIN FROM DOPED GLASS
Title (de)
BILDUNG VON SOURCE/DRAIN MIT CLOTIERTEM GLAS
Title (fr)
FORMATION D'UNE REGION DE SOURCE ET DE DRAIN EN VERRE DOPE
Publication
Application
Priority
- US 53884695 A 19951004
- US 9616002 W 19961003
Abstract (en)
[origin: WO9713273A1] A process for fabricating a source and drain region which includes a more lightly doped source and drain tip region immediately adjacent to the gate and a more heavily doped main portion of the source and drain region spaced apart from the gate. A first layer (16) of glass (2 % BSG) is used to provide the source of doping for the tip region and a second layer (35) of glass (6 % BSG) is used to provide the dopant for the more heavily doped major portion of source and drain regions. Spacers (31) are formed between the glass layers to define the tip region from the main portion of the source and drain regions.
IPC 1-7
IPC 8 full level
H01L 21/225 (2006.01); H01L 21/336 (2006.01); H01L 21/8238 (2006.01); H01L 27/092 (2006.01); H01L 29/78 (2006.01)
CPC (source: EP KR)
H01L 21/2255 (2013.01 - EP); H01L 21/385 (2013.01 - KR); H01L 21/823814 (2013.01 - EP); H01L 29/6656 (2013.01 - EP); H01L 29/6659 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
WO 9713273 A1 19970410; AU 7257496 A 19970428; EP 0853815 A1 19980722; EP 0853815 A4 19991027; IL 123799 A0 19981030; JP 2001504639 A 20010403; KR 19990064285 A 19990726
DOCDB simple family (application)
US 9616002 W 19961003; AU 7257496 A 19961003; EP 96934065 A 19961003; IL 12379996 A 19961003; JP 51449897 A 19961003; KR 19980702779 A 19980404