EP 0857876 A3 19990707 - Method and apparatus to control the suction capacitiy of vacuum pumps
Title (en)
Method and apparatus to control the suction capacitiy of vacuum pumps
Title (de)
Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
Title (fr)
Procédé et appareil de régulation de la capacité d'aspiration d'une pmpe à vide
Publication
Application
Priority
DE 19704234 A 19970205
Abstract (en)
[origin: US6030181A] A vacuum apparatus including at least one vacuum pump having at least one stage and high-vacuum and fore vacuum connections, and a connection line communicating a point located between the high vacuum and fore vacuum connections with the high vacuum connection; and a method for controlling a suction speed of the at least one vacuum pump.
IPC 1-7
IPC 8 full level
F04C 25/02 (2006.01); F04B 37/14 (2006.01); F04B 37/16 (2006.01); F04C 23/00 (2006.01); F04C 28/24 (2006.01); F04D 19/04 (2006.01); F04D 27/02 (2006.01)
CPC (source: EP US)
F04B 37/14 (2013.01 - EP US); F04C 28/24 (2013.01 - EP US); F04D 19/04 (2013.01 - EP US); F04D 27/009 (2013.01 - EP US); F04C 2270/42 (2013.01 - EP US)
Citation (search report)
- [A] EP 0401741 A1 19901212 - CIT ALCATEL [FR]
- [A] DE 4410903 A1 19951005 - LEYBOLD AG [DE]
- [A] EP 0344345 A1 19891206 - LEYBOLD AG [DE]
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
US 6030181 A 20000229; AT E235004 T1 20030415; DE 19704234 A1 19980806; DE 19704234 B4 20060511; DE 59807507 D1 20030424; EP 0857876 A2 19980812; EP 0857876 A3 19990707; EP 0857876 B1 20030319; JP H10220373 A 19980818
DOCDB simple family (application)
US 1888898 A 19980205; AT 98100358 T 19980112; DE 19704234 A 19970205; DE 59807507 T 19980112; EP 98100358 A 19980112; JP 35053897 A 19971219