EP 0859409 B1 20111012 - Method of manufacturing diamond heat sink
Title (en)
Method of manufacturing diamond heat sink
Title (de)
Verfahren zur Herstellung einer Wärmesenke aus Diamant
Title (fr)
Méthode de fabrication d'un dissipateur de chaleur en diamant
Publication
Application
Priority
JP 3010297 A 19970214
Abstract (en)
[origin: EP0859409A2] A diamond polycrystal body having metal films on its upper and lower surfaces is prepared. The diamond polycrystal body is cut in the vertical direction to form a diamond polycrystal body piece (1) having upper and lower surfaces and a cut surface connecting the upper and lower surfaces. The cut surface of diamond polycrystal body piece (1) is plasma-treated. A method of manufacturing a diamond heat sink removed of a damage layer on its cut surface and having prescribed insulation is thus provided. <IMAGE>
IPC 8 full level
C04B 35/52 (2006.01); C04B 41/88 (2006.01); C30B 33/00 (2006.01); H01L 21/48 (2006.01); H01L 23/373 (2006.01)
CPC (source: EP US)
H01L 21/4871 (2013.01 - EP US); H01L 21/4878 (2013.01 - EP US); H01L 23/3732 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US); Y10S 257/93 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0859409 A2 19980819; EP 0859409 A3 19990120; EP 0859409 B1 20111012; JP H10226589 A 19980825; US 6007730 A 19991228
DOCDB simple family (application)
EP 98300865 A 19980205; JP 3010297 A 19970214; US 2154698 A 19980210