EP 0860021 A1 19980826 - FACILITY FOR TREATING OBJECTS IN A PROCESS TANK
Title (en)
FACILITY FOR TREATING OBJECTS IN A PROCESS TANK
Title (de)
ANLAGE ZUR BEHANDLUNG VON GEGENSTÄNDEN IN EINEM PROZESSTANK
Title (fr)
INSTALLATION POUR TRAITER DES OBJETS DANS UN CONTENANT
Publication
Application
Priority
- DE 19541436 A 19951107
- EP 9604487 W 19961016
Abstract (en)
[origin: DE19541436A1] In a facility for treating objects in a process tank (1) in which at least one treatment fluid is introduced and/or discharged therefrom, an even fluid distribution and pressure distribution over the entire cross-section of the process tank (1) or treatment chamber with laminar flow conditions is assured by at least one fluid-distribution device (4, 8) through which the treatment fluid is introduced or removed. The fluid distribution system (4, 8) preferably comprises at least one porous rod (4), at least one porous plate (8), at least one capillary plate (8) and/or at least one single- or multi-layered fabric element (8).
IPC 1-7
IPC 8 full level
B01D 53/26 (2006.01); H01L 21/00 (2006.01); H01L 21/205 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01)
CPC (source: EP KR US)
H01L 21/67017 (2013.01 - EP KR US); H01L 21/67057 (2013.01 - EP KR US); Y10S 134/902 (2013.01 - EP US)
Citation (search report)
See references of WO 9717722A1
Designated contracting state (EPC)
AT DE FR
DOCDB simple family (publication)
DE 19541436 A1 19970515; DE 19541436 C2 19981008; AU 7293496 A 19970529; CA 2234116 A1 19970515; EP 0860021 A1 19980826; JP H11501461 A 19990202; KR 19990067372 A 19990816; TW 389739 B 20000511; US 2001008142 A1 20010719; US 6523552 B2 20030225; WO 9717722 A1 19970515
DOCDB simple family (application)
DE 19541436 A 19951107; AU 7293496 A 19961016; CA 2234116 A 19961016; EP 9604487 W 19961016; EP 96934699 A 19961016; JP 51778197 A 19961016; KR 19980703382 A 19980507; TW 85112664 A 19961016; US 6861898 A 19980707