EP 0860608 A3 19991013 - Diaphragm pump based liquid transport apparatus
Title (en)
Diaphragm pump based liquid transport apparatus
Title (de)
Als Membranpumpe ausgebildete Vorrichtung zum Befördern von Flüssigkeit
Title (fr)
Appareil de transport de liquides en forme de pompe à membrane
Publication
Application
Priority
JP 5550697 A 19970224
Abstract (en)
[origin: EP0860608A2] A liquid transport apparatus can operate without having an object liquid directly contacting sliding sections, so that it can prevent particle contamination of the object liquid to assure delivery of a clean liquid feed to a subsequent processing station. The apparatus comprises a fixed wall having a liquid flow hole; a deformable wall for defining an object liquid space with a variable volume in conjunction with the fixed wall; and a driver device for generating a controlled movement of the deformable wall.
IPC 1-7
IPC 8 full level
F04B 43/06 (2006.01); B01F 3/08 (2006.01); B01J 4/00 (2006.01); F04B 43/073 (2006.01); F04B 43/113 (2006.01); F04B 53/14 (2006.01); H01L 21/205 (2006.01); H01L 21/31 (2006.01)
CPC (source: EP KR US)
F04B 13/00 (2013.01 - KR); F04B 43/0054 (2013.01 - KR); F04B 43/073 (2013.01 - EP US); F04B 43/113 (2013.01 - EP US); F04B 53/143 (2013.01 - EP); F05B 2210/11 (2013.01 - KR); F05B 2260/60 (2013.01 - KR); Y10S 417/00 (2013.01 - KR)
Citation (search report)
- [X] FR 2255585 A1 19750718 - POUDRES & EXPLOSIFS STE NALE [FR]
- [X] EP 0248514 A1 19871209 - TECHNICON INSTR [US]
- [X] EP 0529334 A2 19930303 - MKS INSTR INC [US]
- [X] DE 19523371 C1 19960515 - EKT ENGESER KABELTECHNIK GMBH [DE]
- [X] DE 3134911 A1 19830317 - GRUENBECK JOSEF WASSERAUFB [DE]
- [X] DE 4420694 A1 19951221 - ERICH SCHEUGENPFLUG MASCHINENB [DE]
- [X] EP 0376497 A1 19900704 - CYBOR INC [US]
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0860608 A2 19980826; EP 0860608 A3 19991013; JP H10238470 A 19980908; KR 100485225 B1 20050805; KR 19980071597 A 19981026; TW 349879 B 19990111
DOCDB simple family (application)
EP 98103138 A 19980223; JP 5550697 A 19970224; KR 19980005543 A 19980223; TW 87102616 A 19980224