EP 0861338 A1 19980902 - SURFACE TREATMENT METHOD AND DEVICE THEREFOR
Title (en)
SURFACE TREATMENT METHOD AND DEVICE THEREFOR
Title (de)
VERFAHREN ZUR OBERFLÄCHENBEHANDLUNG SOWIE VORRICHTUNG ZUR DESSEN DURCHFÜHRUNG
Title (fr)
PROCEDE DE TRAITEMENT DE SURFACE ET DISPOSITIF DE MISE EN OEUVRE DU PROCEDE
Publication
Application
Priority
- CH 9600400 W 19961112
- CH 320795 A 19951113
Abstract (en)
[origin: WO9718344A1] A surface treatment method wherein one or more active particle streams are generated and aimed at a surface to be treated so that the particle stream interacts therewith. The active particle stream consists of activated particles forming chemically active sites on the surface, and modifying particles occupying said sites. The energy of the activated particles is greater than the energy at break of the inhibited surface bonds of the surface, and lower than the radiative flaw formation energy on the surface. The strength of the particle stream at the treated surface is greater than a quantity N/t where N is the surface density of the inhibited bonds to be broken and t is the duration of exposure of any point on the treated surface to the stream. A device for carrying out the method is also provided.
IPC 1-7
IPC 8 full level
C23C 8/10 (2006.01); C23C 8/36 (2006.01); C23C 16/452 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP US)
C23C 8/10 (2013.01 - EP US); C23C 8/36 (2013.01 - EP US); C23C 16/452 (2013.01 - EP US); H01L 21/3065 (2013.01 - EP US)
Citation (search report)
See references of WO 9718344A1
Designated contracting state (EPC)
CH DE ES FR GB IT LI NL
DOCDB simple family (publication)
WO 9718344 A1 19970522; EP 0861338 A1 19980902; US 2001002285 A1 20010531; US 6365235 B2 20020402
DOCDB simple family (application)
CH 9600400 W 19961112; EP 96934312 A 19961112; US 6869598 A 19980513