EP 0867796 B1 20020508 - Flow control valve utilizing sonic nozzle
Title (en)
Flow control valve utilizing sonic nozzle
Title (de)
Durchflussregler unter Verwendung einer Schalldüse
Title (fr)
Régulateur de débit utilisant une buse sonique
Publication
Application
Priority
JP 9133097 A 19970327
Abstract (en)
[origin: EP0867796A1] A flow control valve for a semiconductor manufacturing process, which valve utilizes a pressure sensor between the flow control valve and a subsequent sonic nozzle to detect the gas pressure which is fed back to the valve to control the flow through the valve. <IMAGE>
IPC 1-7
IPC 8 full level
F16K 31/02 (2006.01); F16K 31/06 (2006.01); G01F 1/36 (2006.01); G05D 7/01 (2006.01); G05D 7/06 (2006.01); H10N 30/00 (2023.01)
CPC (source: EP US)
G01F 1/36 (2013.01 - EP US); G05D 7/0635 (2013.01 - EP US); Y10T 137/7759 (2015.04 - EP US); Y10T 137/7761 (2015.04 - EP US)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 0867796 A1 19980930; EP 0867796 B1 20020508; DE 69712462 D1 20020613; DE 69712462 T2 20020829; JP H10268942 A 19981009; US 5988210 A 19991123
DOCDB simple family (application)
EP 97309587 A 19971127; DE 69712462 T 19971127; JP 9133097 A 19970327; US 98024697 A 19971128