EP 0869341 A1 19981007 - Thermal infrared detecting device
Title (en)
Thermal infrared detecting device
Title (de)
Thermischer Infrarotdetektor
Title (fr)
Détecteur thermique à infrarouge
Publication
Application
Priority
JP 8000897 A 19970331
Abstract (en)
A thermal infrared detecting device includes a lower layer portion having a readout circuit, and an upper layer portion having a bolometer thin film covered with an insulating protective film to perform heat/resistance conversion. The upper layer portion and the lower layer portion are spaced apart from each other while sandwiching a vacuum or sealed gas to form a thermal isolation structure, and also electrically connected to each other through an electrode film formed on the insulating protective film or in the insulating protective film. The bolometer thin film also serves as an infrared absorption film.
IPC 1-7
IPC 8 full level
G01J 1/02 (2006.01); B81B 1/00 (2006.01); C01G 45/00 (2006.01); C09K 3/00 (2006.01); G01J 5/02 (2006.01); G01J 5/12 (2006.01); G01J 5/20 (2006.01); H01L 31/09 (2006.01); H01L 37/02 (2006.01)
CPC (source: EP US)
G01J 5/20 (2013.01 - EP US); H01L 31/09 (2013.01 - EP US)
Citation (search report)
- [XA] DE 19539696 A1 19961010 - MITSUBISHI ELECTRIC CORP [JP]
- [AD] US 5286976 A 19940215 - COLE BARRETT E [US]
- [A] US 4853538 A 19890801 - JACKSON JOHN [GB]
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0869341 A1 19981007; JP 3097591 B2 20001010; JP H10274561 A 19981013; US 6339220 B1 20020115
DOCDB simple family (application)
EP 98105737 A 19980330; JP 8000897 A 19970331; US 4056998 A 19980318