EP 0874193 B1 20010110 - Method and apparatus for dry vapor generation
Title (en)
Method and apparatus for dry vapor generation
Title (de)
Methode und Vorrichtung zur Erzeugung von trockenem Dampf
Title (fr)
Méthode et appareil pour produire de la vapeur sèche
Publication
Application
Priority
- EP 95105759 A 19950418
- US 22797394 A 19940415
Abstract (en)
[origin: EP0874193A2] A method and apparatus for dry vapor generation. A manifold assembly with a channel conveys liquid from a liquid source to a vessel (12) secured to the manifold assembly. The vessel includes a fill tube (152) connected to the manifold assembly's channel, and a settling chamber (14). A heater (150) heats liquid in the vessel to generate a vapor that enters the settling chamber (14) through its vapor inlet. The manifold assembly comprises two blocks in mating engagement wherein the outlet port of the first block is aligned with the inlet port of the second block. The outlet port of the second port block is connected to the vessels fill tube. <IMAGE>
IPC 1-7
IPC 8 full level
B01D 1/30 (2006.01); F22B 1/28 (2006.01); F28F 19/01 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR US)
B01D 1/305 (2013.01 - EP US); F22B 1/284 (2013.01 - EP US); H01L 21/304 (2013.01 - KR)
Designated contracting state (EPC)
AT BE CH DE ES FR GB GR IE IT LI NL SE
DOCDB simple family (publication)
EP 0677703 A1 19951018; EP 0677703 B1 19990120; AT E176038 T1 19990215; AT E198648 T1 20010115; DE 69507365 D1 19990304; DE 69519880 D1 20010215; DE 69519880 T2 20010802; EP 0874193 A2 19981028; EP 0874193 A3 19981216; EP 0874193 B1 20010110; JP H0882402 A 19960326; KR 100362770 B1 20030211; KR 950034569 A 19951228; US 5537508 A 19960716
DOCDB simple family (application)
EP 95105759 A 19950418; AT 95105759 T 19950418; AT 98113092 T 19950418; DE 69507365 T 19950418; DE 69519880 T 19950418; EP 98113092 A 19950418; JP 9086195 A 19950417; KR 19950008754 A 19950414; US 22797394 A 19940415