EP 0874537 A1 19981028 - Device for gas excitation by means of a surface-wave plasma and gas treatment installation including such device
Title (en)
Device for gas excitation by means of a surface-wave plasma and gas treatment installation including such device
Title (de)
Vorrichtung zur Gasanregung durch oberflächenwellen-plasma und diese vorrichtung enthaltende gasanregungsanlage
Title (fr)
Dispositif d'excitation d'un gaz par plasma d'onde de surface et installation de traitement de gaz incorporant un tel dispositif
Publication
Application
Priority
FR 9705147 A 19970425
Abstract (en)
The gas excitation system is of the surfaguide(RTM) type and includes a hollow electrically conducting material structure (24) forming a wave guide. This structure is designed to be connected to a microwave generator and is fitted with a passage (38) designed to be traversed by a hollow dielectric tube (40) in which a gas to be excited circulates. The structure has also a wave concentration zone (30) designed to concentrate the microwave radiation produced by the generator towards the tube (40) during operation of the device. The system has in addition a sleeve (42,44) made from a reinforced electromagnetic material which is fixed to the structure (24) and which extends into the extension of the passage (38) so as to surround the hollow tube (40).
Abstract (fr)
Ce dispositif d'excitation d'un gaz, du type surfaguide, comprend une structure creuse (24) formant guide d'ondes, destinée à être raccordée à un générateur de micro-ondes et munie d'un passage (38) traversé par un tube creux (40) diélectrique dans lequel circule le gaz à exciter, et d'une zone (30) de concentration des ondes produites par le générateur vers le tube diélectrique. Il comporte en outre au moins un manchon (42,44) en matériau conducteur de blindage électromagnétique solidaire de ladite structure (24) et s'étendant dans le prolongement dudit passage (38) de manière à entourer ledit tube creux. <IMAGE>
IPC 1-7
IPC 8 full level
B01J 19/12 (2006.01); H05H 1/46 (2006.01)
CPC (source: EP US)
H05H 1/46 (2013.01 - EP US)
Citation (search report)
- [A] EP 0739155 A1 19961023 - UNIV LILLE SCIENCES TECH [FR]
- [A] EP 0415122 A2 19910306 - MORI YUZO [JP], et al
- [A] EP 0197843 A1 19861015 - CENTRE NAT RECH SCIENT [FR]
Designated contracting state (EPC)
BE DE FR GB IT NL
DOCDB simple family (publication)
EP 0874537 A1 19981028; EP 0874537 B1 20031217; CA 2235648 A1 19981025; DE 69820518 D1 20040129; DE 69820518 T2 20040930; FR 2762748 A1 19981030; FR 2762748 B1 19990611; JP H1157460 A 19990302; TW 413731 B 20001201; US 6224836 B1 20010501; ZA 983172 B 19981021
DOCDB simple family (application)
EP 98400974 A 19980421; CA 2235648 A 19980423; DE 69820518 T 19980421; FR 9705147 A 19970425; JP 11536998 A 19980424; TW 87105602 A 19980414; US 6665398 A 19980427; ZA 983172 A 19980415