EP 0881865 B1 20020918 - Device for producing a plurality of low temperature plasma jets
Title (en)
Device for producing a plurality of low temperature plasma jets
Title (de)
Vorrichtung zur Erzeugung einer Vielzahl von Niedertemperatur-Plasmajets
Title (fr)
Dispositif de production d'une pluralité de jets de plasma basse température
Publication
Application
Priority
DE 19722624 A 19970530
Abstract (en)
[origin: EP0881865A2] The appliance has at least one hollow cathode chamber (32) surrounded by a hollow cathode (12) and a high frequency power supply. The cathode has at least one inlet (15) for the gas used and an anode adjacent to one of the cathodes. Cathode and anode have holes (6,7) which face one another and through which the plasma jets (5) pass from the hollow cathode chamber into a process cell. The appliance has several separate individual hollow cathode chambers and each allocated to a plasma jet. The hollow cathode chamber can be divided into a number of separate individual chambers to form individual cathodes each with its own gas inlet
IPC 1-7
IPC 8 full level
H05H 1/24 (2006.01)
CPC (source: EP US)
H05H 1/481 (2021.05 - EP US)
Citation (examination)
D. Korzec et al., Multi-jet hollow cathode discharge for remote polymer deposition, Surface and Coatings Technology 93 (1997) 128-133; Beitrag zum 3rd European Workshop on Large area Coating, Juni 1995, Würzburg
Designated contracting state (EPC)
CH DE FR IT LI
DOCDB simple family (publication)
EP 0881865 A2 19981202; EP 0881865 A3 20000628; EP 0881865 B1 20020918; DE 19722624 A1 19981203; DE 19722624 C2 20010809; DE 59805573 D1 20021024
DOCDB simple family (application)
EP 98109597 A 19980527; DE 19722624 A 19970530; DE 59805573 T 19980527