EP 0883467 A4 20000531 - SUBSTRATE TRANSPORT APPARATUS WITH DOUBLE SUBSTRATE HOLDERS
Title (en)
SUBSTRATE TRANSPORT APPARATUS WITH DOUBLE SUBSTRATE HOLDERS
Title (de)
SUBSTRATTRANSPORTEINRICHTUNG MIT ZWEI SUBSTATHALTER
Title (fr)
APPAREIL DE TRANSPORT DE SUBSTRAT AVEC DOUBLE PORTE-SUBSTRAT
Publication
Application
Priority
- US 9700533 W 19970113
- US 58708796 A 19960116
Abstract (en)
[origin: WO9726117A1] A substrate processing apparatus (230) having a supply of substrates (234, 235), a substrate transport module (232), and a substrate processing module (236). The transport module (232) has a movable arm assembly and two substrate holders (200a, 200b) mounted to the movable art assembly. The substrate holders (200a, 200b) each have two separate holding areas for simultaneously holding two substrates. The movable arm assembly has two pairs of driven arms (248, 249, 250, 251). Each pair of driven arms (248, 249, 250, 251) is connected to a separate one of the holders (200a, 200b) for extending and retracting the holders (200a, 200b) along a radial path relative to a center of the movable arm assembly.
IPC 1-7
IPC 8 full level
B25J 9/06 (2006.01); B25J 9/10 (2006.01); B25J 18/02 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR US)
B25J 9/06 (2013.01 - KR); B25J 9/107 (2013.01 - EP US); H01L 21/67781 (2013.01 - EP US); H01L 21/68707 (2013.01 - EP US); Y10S 414/135 (2013.01 - EP US); Y10S 414/137 (2013.01 - EP US); Y10T 74/20305 (2015.01 - EP US)
Citation (search report)
- No further relevant documents disclosed
- See references of WO 9726117A1
Designated contracting state (EPC)
CH DE FR GB LI NL
DOCDB simple family (publication)
WO 9726117 A1 19970724; AU 1578397 A 19970811; EP 0883467 A1 19981216; EP 0883467 A4 20000531; JP 2000503478 A 20000321; JP 4084417 B2 20080430; KR 19990077353 A 19991025; US 6158941 A 20001212; US 6299404 B1 20011009
DOCDB simple family (application)
US 9700533 W 19970113; AU 1578397 A 19970113; EP 97902015 A 19970113; JP 52611497 A 19970113; KR 19980705500 A 19980716; US 22830599 A 19990112; US 58708796 A 19960116