EP 0885453 A2 19981223 - ELECTRONIC TUBE SYSTEM AND METHOD OF MANUFACTURING SAME
Title (en)
ELECTRONIC TUBE SYSTEM AND METHOD OF MANUFACTURING SAME
Title (de)
RÖHRENSYSTEME UND HERSTELLUNGSVERFAHREN HIERZU
Title (fr)
SYSTEME DE TUBES ELECTRONIQUES ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- DE 9700427 W 19970303
- DE 19609234 A 19960309
Abstract (en)
[origin: DE19609234A1] In known electronic tube systems the upper limit frequency and noise characteristics are limited by the known methods of producing miniaturised multiple electrode tubes, i.e. diodes, triode tubes and multi-electrode tubes. The tube systems disclosed here comprise one or more field-emission or field-ionisation cathodes connected in parallel for electrons or ions, a grid electrode with one or more annular apertures, and one or more anodes. All electrodes are formed consecutively or simultaneously, using corpuscular radiation lithography with indexed deposition, on a planar conducting strip structure which delivers the voltages. The electrode spacing is made sufficiently small to ensure that on average only a mean free path length of the molecules at normal pressure can pass between the emitters and the anode. The range of possible uses of the invention is very wide but relates in particular to high-frequency technology.
IPC 1-7
IPC 8 full level
H01J 17/44 (2006.01); H01J 19/24 (2006.01); H01J 21/10 (2006.01)
CPC (source: EP)
H01J 17/44 (2013.01); H01J 19/24 (2013.01); H01J 21/10 (2013.01)
Citation (search report)
See references of WO 9733295A2
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
DE 19609234 A1 19970911; EP 0885453 A2 19981223; TW 357932 U 19990501; WO 9733295 A2 19970912; WO 9733295 A3 19971204
DOCDB simple family (application)
DE 19609234 A 19960309; DE 9700427 W 19970303; EP 97918006 A 19970303; TW 86205919 U 19970416