EP 0886548 A4 20020320 - METHOD AND APPARATUS FOR DRYING AND CLEANING OBJECTS USING AEROSOLS
Title (en)
METHOD AND APPARATUS FOR DRYING AND CLEANING OBJECTS USING AEROSOLS
Title (de)
VERFAHREN UND VORRICHTUNG ZUR TROCKNUNG UND REINIGUNG VON GEGENSTÄNDEN MITTELS AEROSOLEN
Title (fr)
METHODE ET APPAREIL DE SECHAGE ET DE NETTOYAGE D'OBJETS AU MOYEN D'AEROSOLS
Publication
Application
Priority
- US 9703952 W 19970313
- US 61616596 A 19960314
- US 62468996 A 19960325
Abstract (en)
[origin: WO9733702A1] Method and apparatus for drying and cleaning objects (13A, 13B, 13C) that may have been wetted or contaminated in a manufacturing process. The objects are submerged in a rinse liquid (27) in an enclosed chamber (11), and aerosol particles (39) from a selected liquid (37) are introduced into the chamber above the rinse liquid surface (29), forming a thin film (30) on this surface. As the rinse liquid is slowly drained (41), some aerosol particles settle onto the exposed surfaces (14A, 14B, 14C) of the objects, and displace and remove rinse liquid residues from the exposed surfaces by a "chemical squeegeeing" effect. Surface contaminants are also removed by this process. Chamber pressure is maintained at or near the external environment pressure as the rinse liquid is drained from the chamber.
IPC 1-7
IPC 8 full level
B08B 3/10 (2006.01); B08B 3/12 (2006.01); F26B 5/00 (2006.01); F26B 5/02 (2006.01); F26B 21/14 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01)
CPC (source: EP KR)
B08B 3/04 (2013.01 - KR); B08B 3/102 (2013.01 - EP); B08B 3/12 (2013.01 - EP); B08B 5/00 (2013.01 - KR); F26B 5/005 (2013.01 - EP); F26B 21/145 (2013.01 - EP); H01L 21/02052 (2013.01 - EP); H01L 21/67028 (2013.01 - EP)
Citation (search report)
- [E] US 5653045 A 19970805 - FERRELL GARY W [US]
- [A] EP 0428784 A1 19910529 - CFM TECHNOLOGIES INC [US]
- See references of WO 9733702A1
Designated contracting state (EPC)
DE DK FR GB IE IT NL
DOCDB simple family (publication)
WO 9733702 A1 19970918; CA 2248759 A1 19970918; DE 69733686 D1 20050811; DE 69733686 T2 20060504; EP 0886548 A1 19981230; EP 0886548 A4 20020320; EP 0886548 B1 20050706; IL 126189 A0 19990509; IL 126189 A 20010808; JP 2000507044 A 20000606; JP 3955924 B2 20070808; KR 100299486 B1 20010906; KR 19990087765 A 19991227
DOCDB simple family (application)
US 9703952 W 19970313; CA 2248759 A 19970313; DE 69733686 T 19970313; EP 97916750 A 19970313; IL 12618997 A 19970313; JP 53282997 A 19970313; KR 19980707239 A 19980914