EP 0886617 A1 19981230 - DOOR DRIVE MECHANISMS FOR SUBSTRATE CARRIER AND LOAD LOCK
Title (en)
DOOR DRIVE MECHANISMS FOR SUBSTRATE CARRIER AND LOAD LOCK
Title (de)
TÜRANTRIEBSVORRICHTUNG FÜR SUBSTRATTRÄGER UND LADUNGSSCHLEUSE
Title (fr)
MECANISME D'ENTRA NEMENT DE PORTE DESTINE A UN BOITIER DE TRANSPORT DE SUBSTRATS ET A UN SAS DE CHARGEMENT
Publication
Application
Priority
- US 9611244 W 19960702
- US 49859795 A 19950706
- US 49906995 A 19950706
- US 49885995 A 19950706
- US 49898795 A 19950706
Abstract (en)
[origin: WO9702199A1] A system is provided for batch loading semiconductor wafers into a load lock (22) from a portable carrier (32). The carrier is supported adjacent a load lock chamber. A multilevel end effector (84) associated with the load lock chamber includes a plurality of spaced end effector sets (92). The wafers are engaged and simultaneously retrieved as a grouping, then held in the load lock chamber for subsequent transport, one at a time, into an adjacent transport chamber (28). After transfer of the plurality of wafers from the carrier to the load lock chamber, the carrier and the load lock chamber are sealed and the load lock chamber and transport chambers are evacuated. A variety of mechanisms are provided for moving the end effector sets, and for moving a carrier door (44) and a load lock door (80) between closed and open positions and to a parked position. Mechanisms are also provided for individually moving a carrier door and a load lock door between closed and open positions and then, as a unit, to a parked position.
IPC 1-7
IPC 8 full level
B65G 49/00 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP KR)
B65G 49/07 (2013.01 - KR); H01L 21/67772 (2013.01 - EP); H01L 21/67781 (2013.01 - EP)
Citation (search report)
See references of WO 9702199A1
Designated contracting state (EPC)
CH DE GB IT LI
DOCDB simple family (publication)
WO 9702199 A1 19970123; AU 6408996 A 19970205; CN 1195332 A 19981007; EP 0886617 A1 19981230; JP 4306798 B2 20090805; JP H11513006 A 19991109; KR 19990028767 A 19990415; TW 278200 B 19960611
DOCDB simple family (application)
US 9611244 W 19960702; AU 6408996 A 19960702; CN 96196791 A 19960702; EP 96923623 A 19960702; JP 50529197 A 19960702; KR 19980700066 A 19980106; TW 84109347 A 19950907