Global Patent Index - EP 0889975 B1

EP 0889975 B1 20000607 - DEPOSITION METHOD AND USE OF A PRECURSOR THEREFOR

Title (en)

DEPOSITION METHOD AND USE OF A PRECURSOR THEREFOR

Title (de)

VERFAHREN ZUR ABSCHEIDUNG UND VERWENDUNG EINES VORPRODUKTS HIERFÜR

Title (fr)

PROCEDE DE DEPOT ET UTILISATION D'UN PRECURSEUR A CELA

Publication

EP 0889975 B1 20000607 (EN)

Application

EP 96905965 A 19960329

Priority

IB 9600262 W 19960329

Abstract (en)

[origin: WO9737057A1] The invention relates to use of a molecule with at least one metal atom and a porphyrine-derived ligand as precursor material for decomposition. It further relates to a non-thermal decomposition method with a decomposition means.

IPC 1-7

C23C 16/18

IPC 8 full level

C23C 16/18 (2006.01)

CPC (source: EP)

C23C 16/18 (2013.01)

Designated contracting state (EPC)

DE FR GB

DOCDB simple family (publication)

WO 9737057 A1 19971009; DE 69608821 D1 20000713; DE 69608821 T2 20001207; EP 0889975 A1 19990113; EP 0889975 B1 20000607

DOCDB simple family (application)

IB 9600262 W 19960329; DE 69608821 T 19960329; EP 96905965 A 19960329