EP 0889975 B1 20000607 - DEPOSITION METHOD AND USE OF A PRECURSOR THEREFOR
Title (en)
DEPOSITION METHOD AND USE OF A PRECURSOR THEREFOR
Title (de)
VERFAHREN ZUR ABSCHEIDUNG UND VERWENDUNG EINES VORPRODUKTS HIERFÜR
Title (fr)
PROCEDE DE DEPOT ET UTILISATION D'UN PRECURSEUR A CELA
Publication
Application
Priority
IB 9600262 W 19960329
Abstract (en)
[origin: WO9737057A1] The invention relates to use of a molecule with at least one metal atom and a porphyrine-derived ligand as precursor material for decomposition. It further relates to a non-thermal decomposition method with a decomposition means.
IPC 1-7
IPC 8 full level
C23C 16/18 (2006.01)
CPC (source: EP)
C23C 16/18 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9737057 A1 19971009; DE 69608821 D1 20000713; DE 69608821 T2 20001207; EP 0889975 A1 19990113; EP 0889975 B1 20000607
DOCDB simple family (application)
IB 9600262 W 19960329; DE 69608821 T 19960329; EP 96905965 A 19960329