EP 0900356 A1 19990310 - OPTICAL MEASUREMENT
Title (en)
OPTICAL MEASUREMENT
Title (de)
OPTISCHE MESSUNG
Title (fr)
MESURE OPTIQUE
Publication
Application
Priority
- GB 9701353 W 19970516
- GB 9610471 A 19960518
Abstract (en)
[origin: WO9744633A1] Apparatus for phase contrast microscopy or ellipsometry has a source of coherent radiation with a beam divider (HDE) to derive an interrogating beam and a reference beam therefrom which are directed on to a surface under test. An objective receives two scattered or reflected beams which are combined to provide an optical signal indicative of the structure of the surface.
IPC 1-7
IPC 8 full level
G01B 11/06 (2006.01); G01B 11/24 (2006.01); G01B 11/30 (2006.01); G01N 21/21 (2006.01)
CPC (source: EP)
G01B 11/24 (2013.01); G01B 11/306 (2013.01); G01N 21/211 (2013.01)
Citation (search report)
See references of WO 9744633A1
Designated contracting state (EPC)
CH DE FR GB LI
DOCDB simple family (publication)
WO 9744633 A1 19971127; CN 1225720 A 19990811; EP 0900356 A1 19990310; GB 9610471 D0 19960724; JP 2000510951 A 20000822
DOCDB simple family (application)
GB 9701353 W 19970516; CN 97196506 A 19970516; EP 97923185 A 19970516; GB 9610471 A 19960518; JP 54178397 A 19970516