EP 0904598 A1 19990331 - DEVICE AND METHOD FOR FIXING AND PROTECTING SEMICONDUCTOR WAFERS
Title (en)
DEVICE AND METHOD FOR FIXING AND PROTECTING SEMICONDUCTOR WAFERS
Title (de)
VORRICHTUNG UND VERFAHREN ZUR HALTERUNG UND ZUM SCHUTZ VON HALBLEITER-WAFERN
Title (fr)
DISPOSITIF ET PROCEDE POUR FIXER ET PROTEGER DES TRANCHES DE SEMI-CONDUCTEUR
Publication
Application
Priority
- DE 9800250 W 19980128
- DE 19703059 A 19970128
Abstract (en)
[origin: WO9833205A1] The invention relates to a device for fixing and protecting objects, consisting of a base, walls defining an outer area and an inner area mounted on said base, at least one inlet leading to the outer area, at least one inlet leading to the inner area, and means 844) to produce an overpressure in the outer area (via the inlet) in relation to ambient pressure. The inventive device enables fixing, even in the case of low ambient pressure (< 30 torr) when fixing involving the so-called "Bernoulli effect" is no longer possible. Fixing is specifically provided by the invention so that contact with the reverse side of a silicon disc is no longer required during a vacuum process.
IPC 1-7
IPC 8 full level
H01L 21/677 (2006.01); B25J 15/06 (2006.01); H01L 21/683 (2006.01)
CPC (source: EP KR)
H01L 21/00 (2013.01 - KR); H01L 21/6838 (2013.01 - EP)
Citation (search report)
See references of WO 9833205A1
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
WO 9833205 A1 19980730; CN 1216157 A 19990505; DE 19703059 A1 19980917; EP 0904598 A1 19990331; JP 2000508837 A 20000711; KR 20000064544 A 20001106; TW 348157 B 19981221
DOCDB simple family (application)
DE 9800250 W 19980128; CN 98800069 A 19980128; DE 19703059 A 19970128; EP 98909293 A 19980128; JP 53149298 A 19980128; KR 19980706854 A 19980901; TW 87100728 A 19980120