EP 0906635 B1 20030305 - METHOD FOR USING A NON-VAPORISABLE GETTER
Title (en)
METHOD FOR USING A NON-VAPORISABLE GETTER
Title (de)
VERFAHREN ZUR ANWENDUNG EINES NICHT VERDAMPFBAREN GETTERS
Title (fr)
PROCEDE DE MISE EN OEUVRE D'UN GETTER NON EVAPORABLE
Publication
Application
Priority
- EP 9703180 W 19970618
- FR 9607625 A 19960619
Abstract (en)
[origin: WO9749109A1] The invention discloses a pumping device by non-vaporisable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterised in that it comprises a thin layer of non-vaporisable getter coated on at least almost the whole metal wall surface defining the chamber.
IPC 1-7
IPC 8 full level
H05H 7/00 (2006.01); F04B 37/02 (2006.01); H01J 7/18 (2006.01); H01J 9/18 (2006.01); H01J 41/12 (2006.01); H05H 13/04 (2006.01)
CPC (source: EP US)
H01J 7/18 (2013.01 - EP US); H01J 7/183 (2013.01 - EP US); H05H 7/14 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9749109 A1 19971224; AT E233946 T1 20030315; AU 3340497 A 19980107; CA 2258118 A1 19971224; CA 2258118 C 20100817; DE 69719507 D1 20030410; DE 69719507 T2 20040219; DK 0906635 T3 20030623; EP 0906635 A1 19990407; EP 0906635 B1 20030305; ES 2193382 T3 20031101; FR 2750248 A1 19971226; FR 2750248 B1 19980828; JP 2001503830 A 20010321; JP 4620187 B2 20110126; NO 317454 B1 20041101; NO 985927 D0 19981217; NO 985927 L 19981217; PT 906635 E 20030731; RU 2193254 C2 20021120; US 6468043 B1 20021022
DOCDB simple family (application)
EP 9703180 W 19970618; AT 97929213 T 19970618; AU 3340497 A 19970618; CA 2258118 A 19970618; DE 69719507 T 19970618; DK 97929213 T 19970618; EP 97929213 A 19970618; ES 97929213 T 19970618; FR 9607625 A 19960619; JP 50227698 A 19970618; NO 985927 A 19981217; PT 97929213 T 19970618; RU 99100321 A 19970618; US 20266898 A 19981218