EP 0908916 B1 20040107 - Electron source manufacture method and electron source manufacture apparatus
Title (en)
Electron source manufacture method and electron source manufacture apparatus
Title (de)
Verfahren zur Herstellung einer Elektronenquelle und Vorrichtung zur Herstellung einer Elektronenquelle
Title (fr)
Procédé de fabrication d'une source d'électrons et dispositif pour la fabrication d'une source d'électrons
Publication
Application
Priority
- JP 25059497 A 19970916
- JP 25059597 A 19970916
- JP 29710597 A 19971029
Abstract (en)
[origin: EP0908916A1] A method of manufacturing an electron source with electron emitting elements is provided. The method has a process of depositing a deposit substance in an area including at least an area of the electron emitting element from which area electrons are emitted. The depositing process is performed in an atmosphere of a gas containing at least a source material of the deposit substance, the gas having a mean free path allowing the gas to take a viscous flow state. <IMAGE>
IPC 1-7
IPC 8 full level
H01J 9/02 (2006.01)
CPC (source: EP)
H01J 9/027 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0908916 A1 19990414; EP 0908916 B1 20040107; DE 69820945 D1 20040212; DE 69820945 T2 20041021
DOCDB simple family (application)
EP 98307500 A 19980916; DE 69820945 T 19980916