EP 0909445 A1 19990421 - RECORDING MEDIA HAVING PROTECTIVE OVERCOATS OF HIGHLY TETRAHEDRAL AMORPHOUS CARBON AND METHODS FOR THEIR PRODUCTION
Title (en)
RECORDING MEDIA HAVING PROTECTIVE OVERCOATS OF HIGHLY TETRAHEDRAL AMORPHOUS CARBON AND METHODS FOR THEIR PRODUCTION
Title (de)
MAGNETISCHES AUFZEICHNUNGSMEDIUM MIT EINER SCHUTZSCHICHT AUS AMORPHEM KOHLENSTOFF MIT TETRAEDERSTRUKTUR SOWIE HERSTELLUNGSVERFAHREN DAFÜR
Title (fr)
SUPPORTS D'ENREGISTREMENT PRESENTANT DES REVETEMENTS DE PROTECTION EN CARBONE AMORPHE FORTEMENT TETRAHEDRIQUE ET LEURS PROCEDES DE FABRICATION
Publication
Application
Priority
- US 9709375 W 19970529
- US 1879396 P 19960531
- US 1874696 P 19960531
- US 76133696 A 19961210
- US 76133896 A 19961210
Abstract (en)
[origin: WO9745855A1] The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp<3> carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or "quasi-static") magnetic field, which promotes resonant ionization and ion beam homogenization.
IPC 1-7
IPC 8 full level
C03C 17/22 (2006.01); C23C 14/32 (2006.01); C23C 16/26 (2006.01); C23C 16/27 (2006.01); G11B 5/72 (2006.01); G11B 5/84 (2006.01); H01J 27/18 (2006.01); H01J 37/08 (2006.01)
CPC (source: EP US)
C03C 17/22 (2013.01 - EP); G11B 5/727 (2020.08 - EP US); G11B 5/8408 (2013.01 - EP); H01J 27/18 (2013.01 - EP); H01J 37/08 (2013.01 - EP); H01J 37/32357 (2013.01 - EP); C03C 2217/282 (2013.01 - EP); C03C 2218/151 (2013.01 - EP)
Citation (search report)
See references of WO 9745834A1
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9745855 A1 19971204; AT E296482 T1 20050615; AU 3224297 A 19980105; AU 3293097 A 19980105; DE 69733350 D1 20050630; DE 69733350 T2 20060427; EP 0906636 A1 19990407; EP 0906636 B1 20050525; EP 0909445 A1 19990421; JP 2000512053 A 20000912; JP 2008077833 A 20080403; JP 2008091022 A 20080417; JP 2008117521 A 20080522; JP 2008120676 A 20080529; JP 2008123671 A 20080529; WO 9745834 A1 19971204
DOCDB simple family (application)
US 9709393 W 19970529; AT 97927892 T 19970529; AU 3224297 A 19970529; AU 3293097 A 19970529; DE 69733350 T 19970529; EP 97927892 A 19970529; EP 97928753 A 19970529; JP 2007317761 A 20071207; JP 2007317763 A 20071207; JP 2007317764 A 20071207; JP 2007317765 A 20071207; JP 2007317766 A 20071207; JP 54301297 A 19970529; US 9709375 W 19970529