EP 0916028 B1 20001108 - VALVE ARRANGEMENT
Title (en)
VALVE ARRANGEMENT
Title (de)
VENTILANORDNUNG
Title (fr)
ENSEMBLE CLAPET
Publication
Application
Priority
- DE 19631693 A 19960806
- EP 9704223 W 19970802
Abstract (en)
[origin: DE19631693A1] The valve arrangement comprises two silicon wafers placed on top of each other. The downstream wafer contains a majority of etched through openings (6). The upstream wafer (3) is equipped with a majority a swing valves (7). The latter are modelled by etching the silicon and are located in through frame openings (8). They are connected to the wafer (3) by membrane-type webs (9) enabling elastic opening and closing movements. The individual swing valves (7) contain differing amounts and differing sizes of through openings (6), thereby enabling a widely adjustable range of dynamic pressure and flow control through selective actuation of the valves. The swing valves (7) are actuated by electrical means, resulting in capacitive forces of repulsion and attraction.
IPC 1-7
IPC 8 full level
F15C 5/00 (2006.01)
CPC (source: EP)
F15C 5/00 (2013.01)
Designated contracting state (EPC)
BE DE DK FR GB IT NL
DOCDB simple family (publication)
DE 19631693 A1 19980212; DE 59702612 D1 20001214; EP 0916028 A1 19990519; EP 0916028 B1 20001108; WO 9805871 A1 19980212
DOCDB simple family (application)
DE 19631693 A 19960806; DE 59702612 T 19970802; EP 9704223 W 19970802; EP 97938868 A 19970802