EP 0917725 A1 19990526 - AUTOMATED ADJUSTMENT OF AN ENERGY FILTERING TRANSMISSIION ELECTRON MICROSCOPE
Title (en)
AUTOMATED ADJUSTMENT OF AN ENERGY FILTERING TRANSMISSIION ELECTRON MICROSCOPE
Title (de)
AUTOMATISCHE JUSTIERUNG EINES ENERGIEFILTRIERENDEN TRANSMISSIONSELEKTRONENMIKROSKOPS
Title (fr)
REGLAGE AUTOMATIQUE D'UN MICROSCOPE ELECTRONIQUE A TRANSMISSION A FILTRAGE D'ENERGIE
Publication
Application
Priority
- US 9711896 W 19970710
- US 68497396 A 19960807
Abstract (en)
[origin: WO9806125A1] An energy filtering system of an EFTEM is automatically adjusted using a computer. The computer inserts an energy-selecting slit into the beam path and begins monitoring the position of the electron beam through a combination of the current sensors integral to the slit and the readout of an electron camera. The beam is centered within the slit by adjusting an energy dispersing element while monitoring beam sensors. After initial alignment, the slit is retracted and a reference aperture is inserted at the entrance to the energy filter. The electron camera captures an image of the reference aperture and the computer analyzes the deviations of the aperture image from its known physical dimensions in order to evaluate the electron optical distortions and aberrations of the filter. The computer uses the determined optical parameters to adjust the distortion and aberration correcting optical elements of the filter, whose effects are known due to previous calibration. After correcting the imaging aberrations, the reference aperture is withdrawn, the slit reinserted, and an isochromatic surface of the filter at the plane of the slit is measured by scanning the beam across a slit edge while integrating the transmitted beam intensity on the electron camera. The isochromatic surface thus collected by the electron camera is analyzed by the computer to extract additional aberration coefficients of the filter system. These measured aberration coefficients are used to make calibrated corrections to the filter optics.
IPC 1-7
IPC 8 full level
G01Q 20/04 (2010.01); G01Q 30/02 (2010.01); H01J 37/05 (2006.01); H01J 37/244 (2006.01); H01J 37/252 (2006.01); H01J 37/26 (2006.01)
CPC (source: EP US)
H01J 37/05 (2013.01 - EP US); H01J 37/252 (2013.01 - EP US); H01J 37/26 (2013.01 - EP US); H01J 37/265 (2013.01 - EP US); H01J 2237/24485 (2013.01 - EP US); H01J 2237/24585 (2013.01 - EP US); H01J 2237/2826 (2013.01 - EP US)
Citation (search report)
See references of WO 9806125A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9806125 A1 19980212; DE 69737862 D1 20070809; DE 69737862 T2 20080306; EP 0917725 A1 19990526; EP 0917725 B1 20070627; JP 2000515675 A 20001121; US 5798524 A 19980825
DOCDB simple family (application)
US 9711896 W 19970710; DE 69737862 T 19970710; EP 97936047 A 19970710; JP 50791398 A 19970710; US 68497396 A 19960807