EP 0918938 B1 20020206 - FRICTION VACUUM PUMP
Title (en)
FRICTION VACUUM PUMP
Title (de)
REIBUNGSVAKUUMPUMPE
Title (fr)
POMPE A VIDE ROTATIVE
Publication
Application
Priority
- DE 19632874 A 19960816
- EP 9703477 W 19970702
Abstract (en)
[origin: DE19632874A1] A friction vacuum pump has at least one turbomolecular pump stage (2) joined at its pressure side to a screw pump stage (4). In order to improve the pump properties, a filling stage (3) is arranged between the turbomolecular pump stage (2) and the screw pump stage (4) and has blades (13) whose length corresponds at the suction side to the active length of the blades at the pressure side of the turbomolecular pump stage (2) and at the pressure side to the depth of the suction-side area of the screw (14) of the screw stage (4).
IPC 1-7
IPC 8 full level
F04C 23/00 (2006.01); F04D 19/04 (2006.01)
CPC (source: EP US)
F04C 23/005 (2013.01 - EP US); F04D 19/042 (2013.01 - EP US); F04D 19/044 (2013.01 - EP US); F04D 19/046 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
DE 19632874 A1 19980219; DE 59706325 D1 20020321; EP 0918938 A1 19990602; EP 0918938 B1 20020206; JP 2000516321 A 20001205; JP 3957761 B2 20070815; US 6168374 B1 20010102; WO 9807989 A1 19980226
DOCDB simple family (application)
DE 19632874 A 19960816; DE 59706325 T 19970702; EP 9703477 W 19970702; EP 97931744 A 19970702; JP 51030298 A 19970702; US 24200499 A 19990205