EP 0922293 A1 19990616 - FABRICATION OF GATED ELECTRON-EMITTING DEVICE UTILIZING DISTRIBUTED PARTICLES TO DEFINE GATE OPENINGS
Title (en)
FABRICATION OF GATED ELECTRON-EMITTING DEVICE UTILIZING DISTRIBUTED PARTICLES TO DEFINE GATE OPENINGS
Title (de)
HERSTELLUNG VON GITTERGESTEUERTER ELEKTRONEN EMITTIERENDE QUELLE MITTELS VERTEILTE TEILCHEN ZUR BESTIMMUNG DER GITTERÖFFNUNGEN
Title (fr)
FABRICATION D'UN DISPOSITIF EMETTEUR D'ELECTRONS POURVU D'UNE GRILLE UTILISANT LA DISTRIBUTION DE PARTICULES POUR DEFINIR DES OUVERTURES DE GRILLE
Publication
Application
Priority
- US 9709198 W 19970605
- US 66053696 A 19960607
- US 66053896 A 19960607
Abstract (en)
[origin: WO9747021A1] An electron-emitter having a lower non-insulating emitter region (42), an overlying insulating layer (44), and a gate layer (48A, 60A, 60B, 120A, or 180A/184) is fabricated by a process in which particles (46) are distributed over one of the following layers: the insulating layer, the gate layer, a primary layer (50A, 62A, or 72) provided over the gate layer, a further layer (74) provided over the primary layer, or a pattern-transfer layer (182). The particles are utilized in defining gate openings (54, 66, 80, 122, or 186/188) through the gate layer. The gate openings are then variously employed in forming dielectric openings (56, 58, 80, 114, 128, 144, or 154) through the insulating layer. Electron-emissive elements that can, for example, be shaped like cones (58A or 70A) or like filaments (106B, 116B, 130A, 146A, or 156B) are formed in the dielectric openings.
IPC 1-7
IPC 8 full level
H01J 9/02 (2006.01); H01J 1/304 (2006.01)
CPC (source: EP)
H01J 9/025 (2013.01); H01J 2329/00 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9747021 A1 19971211; DE 69730333 D1 20040923; DE 69730333 T2 20050901; EP 0922293 A1 19990616; EP 0922293 A4 19990616; EP 0922293 B1 20040818; JP 2000512067 A 20000912; JP 4226651 B2 20090218; KR 100323289 B1 20020308; KR 20000016555 A 20000325; TW 389928 B 20000511
DOCDB simple family (application)
US 9709198 W 19970605; DE 69730333 T 19970605; EP 97927842 A 19970605; JP 50069898 A 19970605; KR 19980710145 A 19981207; TW 86107885 A 19970607