EP 0931348 A1 19990728 - PROCESS FOR PRODUCING BARRIER-FREE SEMICONDUCTOR STORAGE ASSEMBLIES
Title (en)
PROCESS FOR PRODUCING BARRIER-FREE SEMICONDUCTOR STORAGE ASSEMBLIES
Title (de)
VERFAHREN ZUR HERSTELLUNG BARRIERENFREIER HALBLEITERSPEICHERANORDNUNGEN
Title (fr)
PROCEDE DE PRODUCTION D'ENSEMBLES MEMOIRES A SEMICONDUCTEUR SANS COUCHES D'ARRET
Publication
Application
Priority
- DE 9702034 W 19970911
- DE 19640211 A 19960930
Abstract (en)
[origin: DE19640211A1] This invention concerns a process for producing an integrated semiconductor storage assembly, particularly with the use of ferroelectric materials as storage dielectrics. To that effect, a conductive connection between an electrode of a storage capacitor and a selector transistor is only produced after depositing of the storage dielectric. This invention also concerns storage assemblies produced according to said production process.
IPC 1-7
IPC 8 full level
H01L 21/8247 (2006.01); H01L 21/02 (2006.01); H01L 27/10 (2006.01); H01L 29/788 (2006.01); H01L 29/792 (2006.01); H10B 12/00 (2023.01); H10B 69/00 (2023.01)
CPC (source: EP KR)
H01L 28/55 (2013.01 - EP); H10B 12/033 (2023.02 - EP); H10B 69/00 (2023.02 - KR)
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
DE 19640211 A1 19980402; CN 1231768 A 19991013; EP 0931348 A1 19990728; JP 2000503813 A 20000328; KR 20000036201 A 20000626; TW 388952 B 20000501; WO 9815008 A1 19980409
DOCDB simple family (application)
DE 19640211 A 19960930; CN 97198369 A 19970911; DE 9702034 W 19970911; EP 97943751 A 19970911; JP 51610998 A 19970911; KR 19997002256 A 19990317; TW 86114055 A 19970926