EP 0931624 A2 19990728 - Surface polishing apparatus with upper surface plate elevating mechanism
Title (en)
Surface polishing apparatus with upper surface plate elevating mechanism
Title (de)
Oberflächenpoliervorrichtung mit Oberseiteplatte Anhebmechanismus
Title (fr)
Dispositif de polissage comprenant un mécanisme de levage du plateau supérieur
Publication
Application
Priority
JP 2509498 A 19980122
Abstract (en)
A surface polishing apparatus is provided with an upper surface plate elevating mechanism that can use a small elevating mechanism to simply and accurately raise and lower an upper surface plate 3 and stop it at a specified position even if the total weight of the upper surface plate, including associated equipment, is large. A plurality of air cylinders 15 constantly support part of the load of the upper surface plate assembly 3A, which includes the upper surface plate 3 and a surface plate supporting frame 5. A servo motor 16 is used to raise and lower the upper surface plate assembly 3A and to stop it at a specified position. <IMAGE>
IPC 1-7
IPC 8 full level
B24B 7/17 (2006.01); B24B 7/22 (2006.01); B24B 37/00 (2012.01)
CPC (source: EP)
B24B 7/17 (2013.01); B24B 37/08 (2013.01); B24B 37/345 (2013.01)
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 0931624 A2 19990728; EP 0931624 A3 20001108; JP H11207608 A 19990803
DOCDB simple family (application)
EP 99300410 A 19990120; JP 2509498 A 19980122