EP 0931939 A3 20000830 - Vacuum pump
Title (en)
Vacuum pump
Title (de)
Vakuumpumpe
Title (fr)
Pompe à vide
Publication
Application
Priority
IT TO971139 A 19971224
Abstract (en)
[origin: EP0931939A2] The invention concerns a vacuum pump (1) for achieving high vacuum conditions comprising a pump casing (5), a first plurality of molecular pumping stages (2) formed by rotor disks (8a,8b) cooperating with stator rings (9a,9b) and housed in a first portion (4a) of said pump casing, and a second plurality of pumping diaphragm stages (3) housed in a second portion (4b) of said pump casing, a first electric motor (13) for driving said rotor disks of the molecular stages, a second electric motor (30) for actuating the diaphragms (40) of the diaphragm stages, and at least a common passage (7) for the passage of the gas discharged from said molecular pumping stages (2) and sucked by said diaphragm pumping stages (3). <IMAGE>
IPC 1-7
F04D 19/04; F04D 25/16; F04B 45/047; F04B 37/14; F04B 27/053
IPC 8 full level
F04B 27/053 (2006.01); F04B 45/047 (2006.01); F04D 19/04 (2006.01)
CPC (source: EP US)
F04B 27/053 (2013.01 - EP); F04B 45/047 (2013.01 - EP US); F04D 19/046 (2013.01 - EP)
Citation (search report)
- [A] DE 4320963 A1 19941020 - KNF NEUBERGER GMBH [DE]
- [A] DE 3826710 A1 19890216 - JAPAN ATOMIC ENERGY RES INST [JP], et al
- [A] EP 0344345 A1 19891206 - LEYBOLD AG [DE]
- [A] EP 0340685 A2 19891108 - NIPPON FERROFLUIDICS KK [JP]
- [A] EP 0435291 A1 19910703 - CIT ALCATEL [FR]
- [AD] EP 0445855 A1 19910911 - VARIAN SPA [IT]
- [AD] US 4797068 A 19890110 - HAYAKAWA TADASHI [JP], et al
- [AD] US 5039280 A 19910813 - SAULGEOT CLAUDE [FR], et al
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0931939 A2 19990728; EP 0931939 A3 20000830; EP 0931939 B1 20030625; DE 69815806 D1 20030731; DE 69815806 T2 20040519; HK 1021401 A1 20000609; IT 1297347 B1 19990901; IT TO971139 A1 19990624
DOCDB simple family (application)
EP 98111113 A 19980617; DE 69815806 T 19980617; HK 00100211 A 20000113; IT TO971139 A 19971224