EP 0931939 B1 20030625 - Vacuum pump
Title (en)
Vacuum pump
Title (de)
Vakuumpumpe
Title (fr)
Pompe à vide
Publication
Application
Priority
IT TO971139 A 19971224
Abstract (en)
[origin: EP0931939A2] The invention concerns a vacuum pump (1) for achieving high vacuum conditions comprising a pump casing (5), a first plurality of molecular pumping stages (2) formed by rotor disks (8a,8b) cooperating with stator rings (9a,9b) and housed in a first portion (4a) of said pump casing, and a second plurality of pumping diaphragm stages (3) housed in a second portion (4b) of said pump casing, a first electric motor (13) for driving said rotor disks of the molecular stages, a second electric motor (30) for actuating the diaphragms (40) of the diaphragm stages, and at least a common passage (7) for the passage of the gas discharged from said molecular pumping stages (2) and sucked by said diaphragm pumping stages (3). <IMAGE>
IPC 1-7
F04D 19/04; F04D 25/16; F04B 45/047; F04B 37/14; F04B 27/053
IPC 8 full level
F04B 27/053 (2006.01); F04B 45/047 (2006.01); F04D 19/04 (2006.01)
CPC (source: EP US)
F04B 27/053 (2013.01 - EP); F04B 45/047 (2013.01 - EP US); F04D 19/046 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 0931939 A2 19990728; EP 0931939 A3 20000830; EP 0931939 B1 20030625; DE 69815806 D1 20030731; DE 69815806 T2 20040519; HK 1021401 A1 20000609; IT 1297347 B1 19990901; IT TO971139 A1 19990624
DOCDB simple family (application)
EP 98111113 A 19980617; DE 69815806 T 19980617; HK 00100211 A 20000113; IT TO971139 A 19971224