EP 0933982 A3 20020508 - Plasma generator device
Title (en)
Plasma generator device
Title (de)
Gerät mit einem Plasmaerzeuger
Title (fr)
Dispositif de génération de plasma
Publication
Application
Priority
AT 13598 A 19980128
Abstract (en)
[origin: EP0933982A2] Holding section (18) and cathode form part of the nozzle module (11), being handled with it. Clamped in a holder (1) the module has an axis perpendicular to that of the cathode. The contact pin (9) moves axially under spring-loading. The holder includes a detachable fastener (12) accepting the module (11) and also has a gas supply line (3) aligning with the radial inlet of the chamber.
IPC 1-7
IPC 8 full level
B23K 9/00 (2006.01); B23K 10/00 (2006.01); H05H 1/24 (2006.01); H05H 1/26 (2006.01); H05H 1/34 (2006.01)
CPC (source: EP US)
H05H 1/34 (2013.01 - EP US); H05H 1/3478 (2021.05 - EP); H05H 1/3478 (2021.05 - US)
Citation (search report)
- [A] US 5328516 A 19940712 - DIETIKER MARKUS [CH]
- [A] DE 3400281 A1 19850718 - MERKLE WILHELM SCHWEISSMASCH [DE]
- [A] US 4692584 A 19870908 - CANEER JR CLIFFORD [US]
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0933982 A2 19990804; EP 0933982 A3 20020508; EP 0933982 B1 20061025; AT 406243 B 20000327; AT A13598 A 19990815; CA 2260505 A1 19990728; CA 2260505 C 20071204; CZ 296337 B6 20060215; CZ 9900008 A3 20010613; DE 59913939 D1 20061207; ES 2273471 T3 20070501; US 6080955 A 20000627
DOCDB simple family (application)
EP 99890002 A 19990108; AT 13598 A 19980128; CA 2260505 A 19990127; CZ 899 A 19990104; DE 59913939 T 19990108; ES 99890002 T 19990108; US 22898999 A 19990112