EP 0933982 B1 20061025 - Plasma generator device
Title (en)
Plasma generator device
Title (de)
Gerät mit einem Plasmaerzeuger
Title (fr)
Dispositif de génération de plasma
Publication
Application
Priority
AT 13598 A 19980128
Abstract (en)
[origin: EP0933982A2] Holding section (18) and cathode form part of the nozzle module (11), being handled with it. Clamped in a holder (1) the module has an axis perpendicular to that of the cathode. The contact pin (9) moves axially under spring-loading. The holder includes a detachable fastener (12) accepting the module (11) and also has a gas supply line (3) aligning with the radial inlet of the chamber.
IPC 8 full level
B23K 9/00 (2006.01); B23K 10/00 (2006.01); H05H 1/24 (2006.01); H05H 1/26 (2006.01); H05H 1/34 (2006.01)
CPC (source: EP US)
H05H 1/34 (2013.01 - EP US); H05H 1/3478 (2021.05 - EP); H05H 1/3478 (2021.05 - US)
Designated contracting state (EPC)
CH DE ES FR GB IT LI NL SE
DOCDB simple family (publication)
EP 0933982 A2 19990804; EP 0933982 A3 20020508; EP 0933982 B1 20061025; AT 406243 B 20000327; AT A13598 A 19990815; CA 2260505 A1 19990728; CA 2260505 C 20071204; CZ 296337 B6 20060215; CZ 9900008 A3 20010613; DE 59913939 D1 20061207; ES 2273471 T3 20070501; US 6080955 A 20000627
DOCDB simple family (application)
EP 99890002 A 19990108; AT 13598 A 19980128; CA 2260505 A 19990127; CZ 899 A 19990104; DE 59913939 T 19990108; ES 99890002 T 19990108; US 22898999 A 19990112