EP 0934127 B1 20010926 - PROCESS FOR MAKING A PARYLENE COATING
Title (en)
PROCESS FOR MAKING A PARYLENE COATING
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER PARYLENBESCHICHTUNG
Title (fr)
PROCEDE DE FABRICATION DE REVETEMENT A BASE DE PARYLENE
Publication
Application
Priority
- US 9719294 W 19971024
- US 73831996 A 19961025
- US 92893197 A 19970912
Abstract (en)
[origin: WO9818570A1] Multi-level structures including a first layer with a parylene polymer layer deposited thereon as well as methods of making the same. The parylene polymer layers can exhibit enhanced properties such as adhesion and/or strength. The parylene polymer layers can have relatively low levels of impurities. In certain embodiments, the parylene polymer layers are formed using a pulsed plasma treatment.
IPC 1-7
IPC 8 full level
C08J 7/16 (2006.01); B05D 3/14 (2006.01); B05D 7/24 (2006.01); B32B 27/00 (2006.01); C08G 61/10 (2006.01); C23C 14/12 (2006.01); H01L 21/312 (2006.01)
CPC (source: EP KR)
B05D 1/60 (2013.01 - EP); B05D 1/62 (2013.01 - EP); B05D 3/145 (2013.01 - EP); B05D 7/24 (2013.01 - KR)
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
WO 9818570 A1 19980507; AU 5087198 A 19980522; CN 1089281 C 20020821; CN 1244143 A 20000209; DE 69707005 D1 20011031; DE 69707005 T2 20020704; EP 0934127 A1 19990811; EP 0934127 B1 20010926; JP 2002505803 A 20020219; KR 100517008 B1 20050927; KR 20000052803 A 20000825
DOCDB simple family (application)
US 9719294 W 19971024; AU 5087198 A 19971024; CN 97181002 A 19971024; DE 69707005 T 19971024; EP 97913758 A 19971024; JP 52062698 A 19971024; KR 19997003622 A 19990424