EP 0937541 A2 19990825 - Probe end cleaning sheet
Title (en)
Probe end cleaning sheet
Title (de)
Taststiftspitz Reinigungsblatt
Title (fr)
Feuille pour le nettoyage d'extrémité de sonde
Publication
Application
Priority
JP 5623498 A 19980220
Abstract (en)
To remove foreign matter without deforming the end of a probe 211, and prevent new foreign matter from adhering to the end of a probe, there is provided a probe end cleaning sheet comprising a cleaning thin film 110 having fine abrasive powder applied on the surface, an elastic sheet 120 provided in a lower layer of the cleaning thin film 110 and having an elasticity, and a board 130 provided in a lower layer of the elastic sheet 120, in which the cleaning thin film 110 is made of a material which is dented when the end of the probe 211 is pressed with a specified load but is not torn by the end of the probe 211, and the elastic sheet 120 is made of a material which is dented in the pressed portion by the end of the probe 211 when the end of the probe 211 is pressed to the cleaning thin film 110 with the specified load. <IMAGE>
IPC 1-7
IPC 8 full level
G01R 1/06 (2006.01); B24B 29/04 (2006.01); B24D 3/22 (2006.01); B24D 11/00 (2006.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01)
CPC (source: EP US)
B24B 29/04 (2013.01 - EP US); B24D 3/22 (2013.01 - EP US); B24D 11/001 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
EP 0937541 A2 19990825; EP 0937541 A3 20020710; CN 1232288 A 19991020; JP H11238768 A 19990831; SG 71910 A1 20000418; TW 409322 B 20001021; US 2002028641 A1 20020307
DOCDB simple family (application)
EP 99301238 A 19990219; CN 99103313 A 19990214; JP 5623498 A 19980220; SG 1999000645 A 19990219; TW 88102086 A 19990210; US 24985899 A 19990216