EP 0939883 A1 19990908 - SPEED OF ROTATION SENSOR
Title (en)
SPEED OF ROTATION SENSOR
Title (de)
DREHRATENSENSOR
Title (fr)
CAPTEUR DE VITESSE DE ROTATION
Publication
Application
Priority
- DE 9702671 W 19971114
- DE 19648425 A 19961122
Abstract (en)
[origin: DE19648425C1] A speed of rotation sensor is a micromechanical silicon component. A ring (1) with a stiff strut (11) is suspended by elastic braces (10) and anchors (9) on a substrate in such a way that it can oscillate around its central axis and be tilted around the strut when outer torques are applied. Electric voltages can be applied to electrodes located on the ring and substrate to make the ring oscillate around its central axis and to detect oscillations around the strut. Additional electrodes may be provided on the ring and substrate to generate electrostatic forces and hence to stabilise the ring in its rest position.
IPC 1-7
IPC 8 full level
G01C 9/04 (2006.01); G01C 19/56 (2012.01)
CPC (source: EP KR US)
G01C 19/56 (2013.01 - KR); G01C 19/5712 (2013.01 - EP US)
Citation (search report)
See references of WO 9823917A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
DE 19648425 C1 19980102; CN 1286751 A 20010307; EP 0939883 A1 19990908; JP 2001504587 A 20010403; KR 20000057194 A 20000915; US 6094985 A 20000801; WO 9823917 A1 19980604
DOCDB simple family (application)
DE 19648425 A 19961122; CN 97199993 A 19971114; DE 9702671 W 19971114; EP 97949923 A 19971114; JP 52412898 A 19971114; KR 19997004513 A 19990521; US 30873099 A 19990524