EP 0946781 A1 19991006 - VACUUM TREATMENT EQUIPMENT
Title (en)
VACUUM TREATMENT EQUIPMENT
Title (de)
VAKUUMBEHANDLUNGSANLAGE
Title (fr)
INSTALLATION DE TRAITEMENT SOUS VIDE
Publication
Application
Priority
- CH 9700482 W 19971223
- CH 317996 A 19961223
Abstract (en)
[origin: WO9828461A1] In order to utilise in an optimal manner the wall of a vacuum container with openings (3) for flanging surface treatment stations, conductors (62) are incorporated into the wall material along surface lines of the wall cylinder and these conductors (62) are connected by connecting pipes (64) to the adjacent openings (3) for the treatment chambers.
IPC 1-7
IPC 8 full level
C23C 14/56 (2006.01); G11B 7/26 (2006.01)
CPC (source: EP)
C23C 14/56 (2013.01); C23C 14/566 (2013.01)
Citation (search report)
See references of WO 9828461A1
Designated contracting state (EPC)
AT CH DE ES FR GB IT LI NL SE
DOCDB simple family (publication)
WO 9828461 A1 19980702; AU 7874198 A 19980717; EP 0946781 A1 19991006; JP 2001506701 A 20010522
DOCDB simple family (application)
CH 9700482 W 19971223; AU 7874198 A 19971223; EP 97948672 A 19971223; JP 52818998 A 19971223