EP 0949984 A1 19991020 - ROTATABLE AND TRANSLATABLE SPRAY NOZZLE
Title (en)
ROTATABLE AND TRANSLATABLE SPRAY NOZZLE
Title (de)
DREHBARE UND VERSCHIEBBARE SPRÜHDÜSE
Title (fr)
BUSE DE PULVERISATION POUVANT TOURNER ET EFFECTUER UNE TRANSLATION
Publication
Application
Priority
- US 9723368 W 19971219
- US 77348996 A 19961223
Abstract (en)
[origin: WO9828107A1] A nozzle (18) having a series of orifices (40) along a longitudinal length of the nozzle for processing a substrate (1, 12) and which is rotatably adjustable. By the nozzle design of the present invention, liquid is properly distributed along the longitudinal length of the nozzle (18) independently of the angle of the aerosol spray. This allows for the generation of a uniform aerosol stream that is independent of spray angle. The nozzle design of the present invention improves the uniform distribution of liquid within the nozzle (18), which in addition to providing a more uniform liquid pooling, also substantially eliminates temporal non-uniformities across the nozzle length. Moreover, the present invention is also directed to a nozzle (18) that is translatable in the direction (B) toward or away from the substrate (1, 12) to be processed or parallel to the substrate surface. The nozzle (18) includes a series of impingement orifices (40) provided in a longitudinal direction along at least a part of the nozzle, wherein the nozzle has an interior longitudinally divided into first and second internal cavities (104, 106) with plural openings (108) between the first and second internal cavities (104, 106), and the openings (108) between the first and second cavities are oriented at a different radial angle from the longitudinal axis than the radial angle of the impingement orifices. Preferably, the nozzle (18) comprises an inner tube (100) and an outer tube (90) operatively supported and connected with respect to one another. The present invention is also directed to the combination of such a nozzle (18) that is rotationally (A) and translatable (B) adjustable independently from one another.
IPC 1-7
IPC 8 full level
B05B 1/20 (2006.01); B24C 1/00 (2006.01); B24C 3/32 (2006.01); B24C 5/04 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01); B05B 1/00 (2006.01)
CPC (source: EP KR US)
B05B 1/20 (2013.01 - EP US); B24C 1/00 (2013.01 - KR); B24C 1/003 (2013.01 - EP US); B24C 3/322 (2013.01 - EP US); B24C 5/04 (2013.01 - EP US); H01L 21/67051 (2013.01 - EP US); B05B 1/005 (2013.01 - EP US)
Citation (search report)
See references of WO 9828107A1
Designated contracting state (EPC)
DE FR
DOCDB simple family (publication)
WO 9828107 A1 19980702; DE 69730349 D1 20040923; DE 69730349 T2 20050210; EP 0949984 A1 19991020; EP 0949984 B1 20040818; JP 2001506925 A 20010529; JP 3672321 B2 20050720; KR 100483343 B1 20050415; KR 20000062322 A 20001025; US 5942037 A 19990824
DOCDB simple family (application)
US 9723368 W 19971219; DE 69730349 T 19971219; EP 97953291 A 19971219; JP 52892198 A 19971219; KR 19997005761 A 19990623; US 77348996 A 19961223