Global Patent Index - EP 0950881 A3

EP 0950881 A3 2000-08-16 - Method and device for automatically positioning samples relative to an ellipsometer

Title (en)

Method and device for automatically positioning samples relative to an ellipsometer

Title (de)

Verfahren und Vorrichtung zur automatischen relativen Justierung von Proben bezüglich eines Ellipsometers

Title (fr)

Méthode et dispositif pour l'ajustage automatique d'échantillons relativement à un ellipsomètre

Publication

EP 0950881 A3 (DE)

Application

EP 99106726 A

Priority

  • DE 19816974 A
  • DE 29815297 U

Abstract (en)

[origin: US6091499A] Normally, repeated calibration measurements are necessary for the adjustment of the sample and ellipsometer. To achieve an automatic relative adjustment, a sample position detection system that can be adjusted in relation to the ellipsometer and locked in is assigned to the ellipsometer, and where the detection system is connected to an adjusting system that affects the sample table and/or the entire system detection system/ellipsometer. The method for automatic relative adjustment is provided for, that by initially using one sample, the system sample/ellipsometer is adjusted via the symmetry of the detector signal of the ellipsometer, and that the sample position detection system is adjusted and subsequently locked in with the ellipsometer. With all subsequent samples, a relative adjustment of sample and ellipsometer detection system is performed using the signals of the detection system. In particular, the measurements can be performed without moving the sample itself because the adjustment can also be carried out through a single movement of the ellipsometer detection system.

IPC 1-7 (main, further and additional classification)

G01J 4/00; G01J 4/04; G01N 21/21

IPC 8 full level (invention and additional information)

G01B 11/00 (2006.01); G01B 11/26 (2006.01); G01J 4/00 (2006.01); G01J 4/04 (2006.01); G01N 21/01 (2006.01); G01N 21/13 (2006.01); G01N 21/21 (2006.01)

CPC (invention and additional information)

G01B 11/26 (2013.01); G01J 4/00 (2013.01)

Citation (search report)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

US 6091499 A 20000718; EP 0950881 A2 19991020; EP 0950881 A3 20000816; JP 3247660 B2 20020121; JP H11344436 A 19991214

INPADOC legal status


2002-01-17 [REG DE 8566] DESIGNATED COUNTRY DE NOT LONGER VALID

2001-12-05 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20010217

2001-05-02 [AKX] PAYMENT OF DESIGNATION FEES

2000-08-16 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A3

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2000-08-16 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Free text: AL;LT;LV;MK;RO;SI

2000-08-16 [RIC1] CLASSIFICATION (CORRECTION)

- Free text: 7G 01J 4/00 A, 7G 01N 21/21 B, 7G 01J 4/04 B

1999-10-20 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

1999-10-20 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Free text: AL;LT;LV;MK;RO;SI