Title (en)

PARTICLE BEAM DEVICE

Title (de)

KORPUSKULARSTRAHLGERÄT

Title (fr)

DISPOSITIF A FAISCEAUX DE PARTICULES

Publication

EP 0953202 A1 19991103 (EN)

Application

EP 98965162 A 19981117

Priority

• EP 98965162 A 19981117
• EP 9807381 W 19981117
• EP 97120124 A 19971117

Abstract (en)

[origin: EP0917177A1] Apparatus has source (2) for producing primary corpuscles e.g. electrons, in a primary beam (PE). Particle lens (24) deflects corpuscles from the source to sample (26), and detector (14) senses secondary corpuscles from sample. Magnetic and electrostatic excursion deflectors (52,54) cause primary beam to be directed obliquely to optical axis (A), and deflector (56) below the detector guides the primary beam to optical axis.

IPC 1-7

H01J 37/04; H01J 37/28

IPC 8 full level

H01J 37/04 (2006.01); H01J 37/28 (2006.01)

CPC (source: EP)

H01J 37/04 (2013.01); H01J 37/28 (2013.01)

Citation (search report)

See references of WO 9926272A1

Designated contracting state (EPC)

DE FR GB NL

DOCDB simple family (publication)

EP 0917177 A1 19990519; EP 0953202 A1 19991103; WO 9926272 A1 19990527

DOCDB simple family (application)

EP 97120124 A 19971117; EP 9807381 W 19981117; EP 98965162 A 19981117