EP 0953202 A1 19991103 - PARTICLE BEAM DEVICE
Title (en)
PARTICLE BEAM DEVICE
Title (de)
KORPUSKULARSTRAHLGERÄT
Title (fr)
DISPOSITIF A FAISCEAUX DE PARTICULES
Publication
Application
Priority
- EP 98965162 A 19981117
- EP 9807381 W 19981117
- EP 97120124 A 19971117
Abstract (en)
[origin: EP0917177A1] Apparatus has source (2) for producing primary corpuscles e.g. electrons, in a primary beam (PE). Particle lens (24) deflects corpuscles from the source to sample (26), and detector (14) senses secondary corpuscles from sample. Magnetic and electrostatic excursion deflectors (52,54) cause primary beam to be directed obliquely to optical axis (A), and deflector (56) below the detector guides the primary beam to optical axis.
IPC 1-7
IPC 8 full level
H01J 37/04 (2006.01); H01J 37/28 (2006.01)
CPC (source: EP)
H01J 37/04 (2013.01); H01J 37/28 (2013.01)
Citation (search report)
See references of WO 9926272A1
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 0917177 A1 19990519; EP 0953202 A1 19991103; WO 9926272 A1 19990527
DOCDB simple family (application)
EP 97120124 A 19971117; EP 9807381 W 19981117; EP 98965162 A 19981117