EP 0956583 A1 19991117 - DEVICE FOR TREATING SUBSTRATES IN A FLUID CONTAINER
Title (en)
DEVICE FOR TREATING SUBSTRATES IN A FLUID CONTAINER
Title (de)
VORRICHTUNG ZUM BEHANDELN VON SUBSTRATEN IN EINEM FLUID-BEHÄLTER
Title (fr)
DISPOSITIF POUR TRAITER DES SUBSTRATS DANS UN RECIPIENT A FLUIDES
Publication
Application
Priority
- DE 19621587 A 19960529
- EP 9701576 W 19970327
Abstract (en)
[origin: DE19722423A1] The device enables the substrate (5) to be moved in the container (1) during processing. Guides (7) for the substrate are arranged in or on at least one container inner wall (3,4). At least one region of one container wall forms an ultrasonic radiator for subjecting the substrate in the container to ultrasound. The substrate can be raised and lowered on a movable substrate holder (6) during processing. The holder, which may have a holding range, may have a mount that is located in the perpendicular direction to the substrate surface, and lies on the substrate.
IPC 1-7
IPC 8 full level
B08B 3/10 (2006.01); B08B 3/12 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01)
CPC (source: EP KR US)
B08B 3/10 (2013.01 - EP US); B08B 3/102 (2013.01 - EP US); B08B 3/12 (2013.01 - EP US); H01L 21/02052 (2013.01 - EP US); H01L 21/304 (2013.01 - KR); H01L 21/67051 (2013.01 - EP US); H01L 21/67057 (2013.01 - EP US); Y10S 134/902 (2013.01 - EP US)
Citation (search report)
See references of WO 9745860A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
DE 19722423 A1 19971211; DE 19722423 C2 19990422; EP 0956583 A1 19991117; ID 16917 A 19971120; JP 3699485 B2 20050928; JP H11512888 A 19991102; KR 100338895 B1 20020718; KR 19990076665 A 19991015; TW 461828 B 20011101; US 6240938 B1 20010605; WO 9745860 A1 19971204
DOCDB simple family (application)
DE 19722423 A 19970528; EP 9701576 W 19970327; EP 97915452 A 19970327; ID 971632 A 19970516; JP 54143797 A 19970327; KR 19980704777 A 19980622; TW 86106386 A 19970513; US 76171796 A 19961206