EP 0956594 A1 19991117 - HIGH RESISTIVITY SILICON CARBIDE SUBSTRATES FOR HIGH POWER MICROWAVE DEVICES
Title (en)
HIGH RESISTIVITY SILICON CARBIDE SUBSTRATES FOR HIGH POWER MICROWAVE DEVICES
Title (de)
SILIZIUMCARBID SUBSTATEN MIT HOHEN SPEZIFISCHEM WIDERSTAND FÜR HOCHLEISTUNGMIKTMIKROWELLENANORDNURGEN
Title (fr)
SUBSTRATS DE CARBURE DE SILICIUM DE HAUTE RESISTIVITE DESTINES A DES DISPOSITIFS MICRO-ONDES HAUTE PUISSANCE
Publication
Application
Priority
US 9701791 W 19970131
IPC 1-7
IPC 8 full level
C30B 29/36 (2006.01); H01L 21/02 (2006.01); H01L 21/203 (2006.01); H01L 21/205 (2006.01); H01L 29/24 (2006.01)
CPC (source: EP)
H01L 21/02529 (2013.01); H01L 21/02581 (2013.01); H01L 21/02631 (2013.01)
Citation (search report)
See references of WO 9834281A1
Citation (third parties)
Third party :
WO 9504171 A1 19950209 - DAIMLER BENZ AG [DE], et al
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
DOCDB simple family (application)
EP 97904220 A 19970131; JP 53283998 A 19970131