EP 0962720 A2 19991208 - Ventilation structure of planarization chamber
Title (en)
Ventilation structure of planarization chamber
Title (de)
Belüftungssystem für einen Raum zur Planarisierung
Title (fr)
Structure de ventilation pour une chambre de planarisation
Publication
Application
Priority
JP 17410698 A 19980605
Abstract (en)
A ventilation structure of a planarization chamber for ventilating the inside of a planarization chamber (1) housing a planarization apparatus(100)which prevents scratching of the workpiece by making the flow of air in the planarization chamber substantially laminar and thereby eliminating the rising of the particles or turbulence. The structure includes intake ducts(2-1, 2-2)provided at a ceiling section (10) and having filter units (4-1, 4-2)attached, an exhaust blower (3) attached to a side section (12), and a perforated chamber(5) defined below the ceiling section(10) and having a large number of perforations (52). By making the outside air be ejected from the perforations (52) of the perforated chamber(5) to the inside of the planarization chamber (1), a laminar flow of the air descending to a lower platen (101) side is formed. This laminar flow pushes the particles in the air around the platen(101) down to the floor section (11) side. An exhaust blower (3) exhausts the particles to the outside of the planarization chamber (1). <IMAGE>
IPC 1-7
IPC 8 full level
B24B 55/06 (2006.01); F24F 13/068 (2006.01); F24F 13/08 (2006.01)
CPC (source: EP KR)
B24B 55/06 (2013.01 - KR); F24F 13/068 (2013.01 - EP); F24F 2013/088 (2013.01 - EP)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0962720 A2 19991208; EP 0962720 A3 20000712; JP H11347937 A 19991221; KR 20000005667 A 20000125
DOCDB simple family (application)
EP 99107384 A 19990423; JP 17410698 A 19980605; KR 19990017545 A 19990517