Global Patent Index - EP 0962720 A3

EP 0962720 A3 2000-07-12 - Ventilation structure of planarization chamber

Title (en)

Ventilation structure of planarization chamber

Title (de)

Belüftungssystem für einen Raum zur Planarisierung

Title (fr)

Structure de ventilation pour une chambre de planarisation

Publication

EP 0962720 A3 (EN)

Application

EP 99107384 A

Priority

JP 17410698 A

Abstract (en)

[origin: EP0962720A2] A ventilation structure of a planarization chamber for ventilating the inside of a planarization chamber (1) housing a planarization apparatus(100)which prevents scratching of the workpiece by making the flow of air in the planarization chamber substantially laminar and thereby eliminating the rising of the particles or turbulence. The structure includes intake ducts(2-1, 2-2)provided at a ceiling section (10) and having filter units (4-1, 4-2)attached, an exhaust blower (3) attached to a side section (12), and a perforated chamber(5) defined below the ceiling section(10) and having a large number of perforations (52). By making the outside air be ejected from the perforations (52) of the perforated chamber(5) to the inside of the planarization chamber (1), a laminar flow of the air descending to a lower platen (101) side is formed. This laminar flow pushes the particles in the air around the platen(101) down to the floor section (11) side. An exhaust blower (3) exhausts the particles to the outside of the planarization chamber (1). <IMAGE>

IPC 1-7 (main, further and additional classification)

F24F 13/068; F24F 3/16

IPC 8 full level (invention and additional information)

B24B 55/06 (2006.01); F24F 13/068 (2006.01); F24F 13/08 (2006.01)

CPC (invention and additional information)

F24F 13/068 (2013.01); F24F 2013/088 (2013.01)

Citation (search report)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

EP 0962720 A2 19991208; EP 0962720 A3 20000712; JP H11347937 A 19991221; KR 20000005667 A 20000125

INPADOC legal status


2001-10-31 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20010115

2001-03-21 [AKX] PAYMENT OF DESIGNATION FEES

- Ref Legal Event Code: AKX

2000-07-12 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2000-07-12 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Ref Legal Event Code: AX

- Free Format Text: AL;LT;LV;MK;RO;SI

2000-07-12 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- Free Format Text: 7F 24F 13/068 A, 7F 24F 3/16 B

1999-12-08 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

1999-12-08 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Ref Legal Event Code: AX

- Free Format Text: AL;LT;LV;MK;RO;SI