EP 0962961 A3 20030813 - Susceptors
Title (en)
Susceptors
Title (de)
Suszeptoren
Title (fr)
Suscepteurs
Publication
Application
Priority
JP 14957398 A 19980529
Abstract (en)
[origin: EP0962961A2] A susceptor comprising a planar heat-conductive layer (3A) having a heating surface for heating an object to be heated and a rear surface, a supporting member (12) for supporting the planar heat-conductive layer from a side of the rear surface thereof, first and second heat-choking portions (7A, 25A) provided between the rear surface of the planar heat-conductive layer and the supporting member in this order. The first heat-choking portion is adapted for restricting a heat flow from the rear surface of the planar heat-conductive layer toward the supporting member, and the second heat-choking portion is adapted for restricting a heat flow from the first heat-choking portion to the supporting member. More uniform temperature distribution at the heating surface is achieved. <IMAGE>
IPC 1-7
IPC 8 full level
H05B 3/20 (2006.01); C23C 14/50 (2006.01); H01L 21/00 (2006.01); H01L 21/205 (2006.01); H01L 21/683 (2006.01); H02N 13/00 (2006.01)
CPC (source: EP KR US)
H01L 21/67098 (2013.01 - EP US); H01L 21/67103 (2013.01 - EP US); H01L 21/6833 (2013.01 - EP US); H02N 13/00 (2013.01 - EP US); H05B 3/00 (2013.01 - KR)
Citation (search report)
- [X] US 5730803 A 19980324 - STEGER ROBERT [US], et al
- [X] US 5591269 A 19970107 - ARAMI JUNICHI [JP], et al
- [A] EP 0493089 A1 19920701 - NGK INSULATORS LTD [JP]
- [X] PATENT ABSTRACTS OF JAPAN vol. 1997, no. 12 25 December 1997 (1997-12-25) & US 5851298 A 19981222 - ISHII NOBUO [JP]
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0962961 A2 19991208; EP 0962961 A3 20030813; JP H11343571 A 19991214; KR 100295145 B1 20010712; KR 19990088384 A 19991227; TW 456157 B 20010921; US 6160244 A 20001212
DOCDB simple family (application)
EP 99304203 A 19990528; JP 14957398 A 19980529; KR 19990017967 A 19990519; TW 88104116 A 19990317; US 31436799 A 19990519