Global patent index - EP 0970261 A1

EP 0970261 A1 2000-01-12 - MAGNESIUM OXIDE SPUTTERING APPARATUS

Title (en)

MAGNESIUM OXIDE SPUTTERING APPARATUS

Title (de)

VORRICHTUNG ZUM SPUTTERN DES MAGNESIUMOXYDS

Title (fr)

APPAREIL DE PULVERISATION CATHODIQUE D'OXYDE DE MAGNESIUM

Publication

EP 0970261 A1 (EN)

Application

EP 98912942 A

Priority

  • US 9805143 W
  • US 82331897 A

Abstract (en)

[origin: WO9842890A1] This invention relates to a method and apparatus for high rate reactive sputtering. Particularly, the invention relates to a method and apparatus of sputter depositing reacted metal-compound films where the sputter deposition rate approaches the deposition rate of the unreacted metal. More particularly, the invention relates to an apparatus wherein the sputter deposition target is placed at a greater than usual distance from the substrate and the target metallic erosion track is confined to a narrower width than is typical in current systems.

IPC 1-7 (main, further and additional classification)

C23C 14/35; H01J 37/34

IPC 8 full level (invention and additional information)

C23C 14/00 (2006.01); C23C 14/08 (2006.01); C23C 14/22 (2006.01); C23C 14/35 (2006.01); H01J 37/34 (2006.01)

CPC (invention and additional information)

C23C 14/225 (2013.01); C23C 14/0036 (2013.01); C23C 14/081 (2013.01); C23C 14/35 (2013.01); H01J 37/3405 (2013.01)

Citation (search report)

See references of WO 9842890A1

Designated contracting state (EPC)

CH DE FR LI

EPO simple patent family

WO 9842890 A1 19981001; AU 6761598 A 19981020; EP 0970261 A1 20000112; JP 2001516398 A 20010925

INPADOC legal status

2002-05-02 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20011002

2000-01-12 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 19990920

2000-01-12 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): CH DE FR LI