EP 0975875 A1 20000202 - VACUUM PUMP SYSTEM FITTED WITH A LIQUID MECHANICAL PUMP
Title (en)
VACUUM PUMP SYSTEM FITTED WITH A LIQUID MECHANICAL PUMP
Title (de)
VAKUUMPUMPSYSTEM MIT EINER FLÜSSIGRINGPUMPE
Title (fr)
SYSTEME DE POMPE A VIDE AVEC POMPE A ANNEAU LIQUIDE
Publication
Application
Priority
- DE 19715480 A 19970414
- EP 9802174 W 19980414
Abstract (en)
[origin: DE19715480A1] Disclosed is a vacuum pump fitted with a liquid mechanical pump for pumping out gas, for example against the atmospheric pressure. According to the invention, the liquid of the liquid mechanical pump (6) is an inert fluid; the liquid mechanical pump (6) works together with a membrane-type primary pump (9) and is provided, on the inlet side, with a suction valve (3) controlled so as to open only when the temperature of the liquid mechanical pump (6) exceeds a lower threshold value.
IPC 1-7
IPC 8 full level
F04C 19/00 (2006.01); F04C 23/00 (2006.01); F04C 28/24 (2006.01)
CPC (source: EP)
F04C 19/004 (2013.01); F04C 23/005 (2013.01); F04C 28/24 (2013.01)
Citation (search report)
See references of WO 9846885A1
Designated contracting state (EPC)
CH DE DK ES FR GB IT LI NL SE
DOCDB simple family (publication)
DE 19715480 A1 19981015; DE 19715480 C2 19990114; DE 59807317 D1 20030403; EP 0975875 A1 20000202; EP 0975875 B1 20030226; WO 9846885 A1 19981022
DOCDB simple family (application)
DE 19715480 A 19970414; DE 59807317 T 19980414; EP 9802174 W 19980414; EP 98922706 A 19980414