EP 0977652 A1 20000209 - ABRASIVE MATERIAL FOR THE NEEDLE POINT OF A PROBE CARD
Title (en)
ABRASIVE MATERIAL FOR THE NEEDLE POINT OF A PROBE CARD
Title (de)
SCHLEIFMITTEL FÜR DEN NADELSPITZ EINER PROBEKARTE
Title (fr)
MATERIAU ABRASIF DESTINE AU POINT D'ESSAI D'UNE CARTE SONDE
Publication
Application
Priority
- JP 10419397 A 19970422
- US 9807722 W 19980416
Abstract (en)
[origin: WO9847663A1] An abrasive material for the needle point of a probe card which can effectively remove foreign matter adhering to the needle point of the probe, protect the needle point from damage and deformation, and prolong the life of the probe. The abrasive material for the needle point of a probe card comprises an abrasive layer including a layer of micro-powdered abrasive grains applied to a substrate and a cushion layer having a buffer action and elasticity.
IPC 1-7
IPC 8 full level
G01R 1/06 (2006.01); B24B 19/16 (2006.01); B24D 3/00 (2006.01); B24D 3/32 (2006.01); B24D 11/00 (2006.01); B24D 15/04 (2006.01); H01L 21/304 (2006.01); H01L 21/66 (2006.01)
CPC (source: EP KR)
B24B 19/16 (2013.01 - EP); B24D 3/002 (2013.01 - EP); B24D 3/32 (2013.01 - EP); B24D 11/00 (2013.01 - EP); B24D 15/04 (2013.01 - EP KR)
Citation (search report)
See references of WO 9847663A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9847663 A1 19981029; CN 1252745 A 20000510; EP 0977652 A1 20000209; JP 3923589 B2 20070606; JP H10300777 A 19981113; KR 100510223 B1 20050831; KR 20010020159 A 20010315; MY 124654 A 20060630; TW 366419 B 19990811
DOCDB simple family (application)
US 9807722 W 19980416; CN 98804406 A 19980416; EP 98918333 A 19980416; JP 10419397 A 19970422; KR 19997009720 A 19991021; MY PI9801785 A 19980421; TW 87106106 A 19980421